Development of Nano-CMM
We are developing Nano-CMM (Coordinate Measuring Machine with Nanometer
Resolution) for measuring micro machines and parts of micro machines.
| Basic construction of Nano-CMM |
Nano-CMM has 10mm x 10mm x 10mm of measuring range with nanometer resolution.
The left figure shows the basic construction of Nano-CMM.
The XY stages of Nano-CMM have two sets of cylinder on two V groves. Thin TFE (Teflon) sheets are positioned between the cylinders an V grooves. The stages are pushed by stepping motors and screws. The movements of stages are measured by holo-gages (Mitutoyo)
 Basic construction of Nano-CMM.
| Influence of thermal effects |
The key technology of Nano-CMM is how to decreese the influence of thermal
effects. We select the symmetrical construction and one material structure
for decreasing the thermal influence.
 Analysis of deformation by thermal effects by FEM
This photograph shows the prototype of Nano-CMM. The repeatability of XY
stages is up to 50 nm.
In the future, Z stage and a probing system will be developed. And
the calibration method for Nano-CMM will be evaluated.
 Prototype of Nano-CMM
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