Nano-CMMとNano-Probeの開発

背景と目的

ナノメートルの分解能で，表面を測定する方法はAFM，STMなどが実用化されているが，機械部品の寸法や形状測定に利用されているような，ナノメートルで三次元形状測定ができる方法（Nano-CMM: Coordinate Measuring Machine with nanometer scale)の開発は遅れている．

関連論文

M. Fujiwara, A. Yamaguchi, K. Takamasu and S. Ozono: Evaluation of Stages of Nano-CMM, Initiatives of precision engineering at the beginning of a millennium (edited by Ichiro Inasaki), Kluwer Academic Publishers (Netherlands), 2001, 634-638 PDF File
K. Takamasu, M. Fujiwara, A. Yamaguchi, M. Hiraki and S. Ozono: Evaluation of Thermal Drift of Nano-CMM, Euspen2001（トリノ，5月）, 2001, 306-309 PDF File
M. Fujiwara, A. Yamaguchi, K. Takamasu and S. Ozono: Evaluation of Stages of Nano-CMM, ICPE2001（横浜，7月）, 2001, 634-638 PDF File
K. Takamasu, M. Fujiwara, H. Naoi, S. Ozono: Friction Drive System for Nano-CMM, Proc. Mechatronics 2000, 2000, pp. 565-568 PDF File
K. Enami, M. Hiraki, K. Takamasu: Nano-Probe Using Optical Sensing, IMEKO-XVI World Congress, 2000, pp. 345-348 PDF File
K. Enami, C-C. Kuo, T. Nogami, M. Hiraki, K. Takamasu, S. Ozono: Development of nano-Probe System Using Optical Sensing, IMEKO-XV World Congress, 1999, pp. 189-192.PDF File
Kiyoshi Takamasu, Masahiko Hiraki, Kazuhiro Enami, Shigeo Ozono: Development of Nano-CMM and Parallel-CMM - CMM in the 21th Century -, Int. Dimensional Metrology Workshop, 1999. PDF File
Kiyoshi Takamasu, Kenji Nogami, Kazuhiro Enami, Shigeo Ozono: Development of Nano-Probe System for Nano-CMM, Proc. China-Japan Bilateral Symposium on Advanced Manufacturing Engineering, China, 1998, pp. 124-129
Kiyoshi Takamasu, Ryoshu Furutani, Shigeo Ozono: Development of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution), Proc. XIV IMEKO World Congress, Finland, 1997, 8 pp.34-39.
Kiyoshi Takamasu, Satoshi Ozawa, Takayuki Asano, Akihiro Suzuki, Ryoshu Furutani, Basic Concepts of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution), Jpn.-China Bilateral Symp. on Advanced Manufacturing Eng., 1996, pp.155-158. PDF File