euspen 2007 (2007年5月) 本文へジャンプ


ISMTII 2007 (2007年9月)

ISMTII 2007 (2007年9月24日〜27日,東北大学,仙台) に高増,高橋,陳,臼杵,梶原,劉が参加しました.高増はPlenary Speachを行いました.

発表した論文:
  • Plenary Speech:Uncertainty Estimation for Coordinate Metrology: Calibration, Form Deviation and Strategy of Measurement (K. Takamasu, S. Takahashi, M. Abbe, R. Furutani) PDF_File
  • Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System (Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kiyoshi Takamasu) PDF_File
  • Study on Scanning Squareness Measurement Method and Uncertainty Estimation (X. Chen, K. Takamasu) PDF_File
  • Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift (S. Usuki, H. Nishioka, S. Takahashi and K. Takamasu) PDF_File
  • Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light (S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu) PDF_File
  • An Optical and Confocal Microscopic System for Nanostereolithography Using Evanescent Light Eliminate of the Nonlinearity in Heterodyne Interferometer (Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu) PDF_File
  • Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data (M. Nara, M. Abbe, K. Takamasu) PDF_File

講演
 Plenary Speech,高増
 高橋の講演
 梶原の講演
 臼杵の講演

ISMTIIの会場

ISMTIIの全員集合写真