ISMTII 2007 (2007年9月)
ISMTII 2007 (2007年9月24日〜27日,東北大学,仙台) に高増,高橋,陳,臼杵,梶原,劉が参加しました.高増はPlenary
Speachを行いました.
発表した論文:
- Plenary
Speech:Uncertainty Estimation for Coordinate Metrology: Calibration, Form Deviation
and Strategy of Measurement (K. Takamasu, S. Takahashi, M. Abbe, R. Furutani) PDF_File
- Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor
AFM System (Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kiyoshi Takamasu) PDF_File
- Study on
Scanning Squareness Measurement Method and Uncertainty Estimation (X. Chen, K. Takamasu) PDF_File
- Experimental Verification for Super-resolution Optical Inspection for Semiconductor
Defect by using Standing Wave Illumination Shift (S. Usuki, H. Nishioka, S. Takahashi and K. Takamasu) PDF_File
- Analysis of Lateral Resolution Improvement for Fluorescence Microscopy
using Standing Evanescent Light (S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu) PDF_File
- An Optical and Confocal Microscopic System for Nanostereolithography Using
Evanescent Light Eliminate of the Nonlinearity in Heterodyne Interferometer
(Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu) PDF_File
- Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations
of the Data (M. Nara, M. Abbe, K. Takamasu) PDF_File
Plenary Speech,高増
高橋の講演
梶原の講演
臼杵の講演

ISMTIIの全員集合写真
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