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Takamasu - Takahashi Lab
Intelligent Nano-Measure


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Updata member page (October, 2015)
Update member page (July, 2014).
Update list of papers (June, 2013).

Takamasu - Takahashi Lab belongs to the department of precision engineering, the University of Tokyo. The main research field of Takamasu Lab is precision metrology. We strongly look to the newly developments in precision metrology.

Research of Takamasu - Takahashi Lab
  • Study on uncertainty and statistical data processing of CMM (Coordinate Measuring Machine)
  • Development of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution)
  • Development of Parallel-CMM (Coordinate Measuring Machine Using Parallel Mechanism)
  • Development of Nano-Probing System Using Optical Sensor
  • Optical Profile Measurement
  • Nano-Metrology Using Evanescent Wave


Newly developments in precision metrology.


Nano-Metrology Using Evanescent Wave


Contact
E-mail: takamasu[at]pe.t.u-tokyo.ac.jp
Tel: +81 3-5841-6450　　Fax: +81 3-5841-8554

Address:
Prof. Kiyoshi TAKAMASU
Department of Precision Engineering, The University of Tokyo,
Hongo 7-3-1, Bunkyo-ku, Tokyo 113-8656, JAPAN

Place:
Hongo Campus, Faculty of Engineering Bldg.14, 9th floor