Research theme
and link to PDF |
Objectives |
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| 3D Displacement Measurement Using Ring-beam |
3D Displacement (Position) Measurement with High Accuracy and Measurement Flexibility to Calibrate the End-effector of the Complicated 3D Mechanism.
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| Study on Algorithm of Reconstructing Topography Based on Topography Difference |
To reconstruct topography based on topography difference, two algorithms
are studied.
- Spatial frequency domain method (SFR)
- Matrix equations method (EQU)
Measurement method: Scan topography twice using two probes with intervals
D1 and D2 so that two sets of topography differences are obtained.
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| Profile Measurement for Wide-Area Soft Thin Film Surface Using Mechano-opto-probe |
Development of a new technique, which can measure the 3D surface of soft
thin film like photoresist with nano resolution in wide area (diameter
of 300mm).
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| Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift |
Development of the inspection system with advantages of optical method and with high-resolution beyond the Rayleigh limit
- High Resolution: less 100nm
- High Sensitivity for Defect detection -
- High Throughput -
- Non-destructive inspection
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| A Study of Super-resolution Microscopy with Standing Evanescent Light |
We propose a super-resolution microscopy with standing evanescent light which is aiming at achieving about a couple dozen of nanometer resolution by exceeding the diffraction limit.
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| Measurement of Thin Film Thickness for Nano-Imprint Lithography Based on
Near-Field Optics |
Measurement method of residual thin film below 100 nm has been required
in the process of nano-imprint lithography, to realize this lithography
as a next-generation lithography with high reliability |
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| Study on Calibration of Planar Motor - Straightness and Squareness measurement
of plane mirrors |
Development of a new calibration method for the planar motor, which enjoys the merits of no external reference and ease for user.
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| Development of Gear Wheel type of Planar Linear Motor System |
Advocate the workers support system, which called “AWB”
Development of transfer mechanism with gear wheel, which can use for moving tray system of AWB system
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| Nano-stereolithography using evanescent light |
Stereolithography for 3-dimensional, um resolution and high throughput.
Using localized photon in 100nm area by Evanescent light.
Nano-stereo-lithography is established for:
・3-dimensional
・sub-um resolution
・high throughput
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| Nano-stereolithography using evanescent light |
Most desired fabrication method (for PhC, NEMS, m-TAS)
・Three-dimensional
・Submicrometer resolution
・High throughputStereolithography
・High throughput
Introduction of Evanescent light to Nano Stereolithography
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| A Novel Microfabrication Technique for Three-Dimensional Metal Structures
by Photocatalysis |
Development of a new microfabrication technique, which can fabricate the
3D complex microstructure consisting of metal with the size scale of several
10 um.
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| Real-time Extraction of Respiratory Sinus Arrhythmia for Application into
Actual Environment |
Development of real-time and high-accuracy extracting method of RSA(Respiratory Sinus Arrhythmia), which is a selective index of cardiac vagal activity, and application into actual environment.
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