List of Publications in 2003 - 2012

• R. Kudo, S. Usuki, S. Takahashi, K. Takamasu: Influence of standing wave phase error on super-resolution optical inspection for periodic microstructures, Meas. Sci. Technol. 23, 2012, 054007 1-13 [PDF File]
• Dong Wei, Nan Wu, Kiyoshi Takamasu, Hirokazu Matsumoto: Remote Internal Diameter Measurement of Ring Gauge based on a Low-coherence Tandem Scheme, Key Engineering Materials Vol. 516, 2012, 533-538 [PDF File]
• S. Takahashi, Y. Kajihara, K. Takamasu: Submicrometer thickness layer fabrication for layer-by-layer microstereolithography using evanescent light, CIRP Annals - Manufacturing Technology 61, 2012, 219-222 [PDF File]
• Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, S. Takahashi, K. Takamasu: Height measurement of single nanoparticles based on evanescent field modulation, International Journal of Nanomanufacturing, Vol. 8, Nos. 5/6, 2012, 419-430 [PDF File]
• Agustinus Winarno, Satoru Takahashi, Akiko Hirai, Kiyoshi Takamasu, Hirokazu Matsumoto: Absolute measurement of gauge block without wringing using tandem low-coherence interferometry, Meas. Sci. Technol. 23, 2012, 125001 1-8 [PDF File]
• 工藤良太，高橋哲，高増潔：半導体ベアウエハ表面ナノ欠陥の超解像光学式計測に関する研究，砥粒加工学会誌 Vol.56 No.10, 2012, 709-710 [PDF File]
• Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu: Fundamental study on nanoremoval processing method for microplastic structures using photocatalyzed oxidation, Key Engineering Materials Vols. 523-524, 2012, 610-614 [PDF File]
• Kenta Matsui, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: New Non-contact Measurement of Small Inside-diameter Using Tandem Low-coherence Interferometer and Optical Fiber Devices, Key Engineering Materials Vols. 523-524, 2012, 871-876 [PDF File]
• Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Development of a non-contact precision measurement technique using optical frequency combs, Key Engineering Materials Vols. 523-524, 2012, 877-882 [PDF File]
• Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu: Sub-Nanometer Line Width and Line Profile Measurement Using STEM Images with Metal Coating, Key Engineering Materials Vols. 523-524, 2012, 957-960 [PDF File]
• D. Wei, K. Takamasu, H. Matsumoto: Synthetic adjacent pulse repetition interval length method to solve integer ambiguity problem: theoretical analysis, Journal of the European Optical Society-Rapid Publications, Vol. 8, 2013, 13016 1-6 [PDF File]
• D. Wei, K. Takamasu, H. Matsumoto: Temporal coherence shaping based on spectral-domain destructive interference of pulses with different self-phase modulations, Journal of the European Optical Society-Rapid Publications, Vol. 8, 2013, 13018 1-6 [PDF File]
• Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu: Random error analysis of profile measurement of large aspheric optical surface using scanning deflectometry with rotation stage, Precision Engineering 37, 2013, 599-605 [PDF File]
• Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Spatial positioning measurements up to 150 m using temporal coherence of optical frequency comb, Precision Engineering 37, 2013, 635-639 [PDF File]
• Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: A study of the possibility of using an adjacent pulse repetition interval length as a scale using a Helium-Neon interferometer, Precision Engineering 37, 2013, 694?698 [PDF File]
  
  

• Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotation Devices -Development of Three Dimensional Measuring Facility and Experiment-, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 137-140 [PDF File]
• X. N. Wang, S. Takahashi, K. Takamasu, H. Matsumoto: Super-heterodyne Interferometer for Length-Measurement Using the Beat Signal of Laser Diodes and the Optical Frequency Comb, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 259-262 [PDF File]
• Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Length measurement based on Pulse repetition interval of a femtosecond optical frequency comb, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 268-271 [PDF File]
• Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface with Improved Deflectometry Method - Principle Introduction and Experimental Verification -, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, SS2-O-3 1-4 [PDF File]
• H. Matsumoto, X. Wang, K. Takamasu: Absolute Measurement of Base Lines up to 400 m Using Temporal Coherence Heterodyne Interferometer of Optical Frequency Comb, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-12 1-4 [PDF File]
• K. Takamasu, S. Takahashi, R. Furutani, M. Abbe: Round Robin Tests of Uncertainty Estimation for Coordinate Metrology by Software Error Propagation, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-15 1-4 [PDF File]
• C. Narin, S. Takahashi, K. Takamasu, H. Matsumoto: Step Gauge Measurement Using High-Frequency Repetitions of a Mode-Locked Fiber Laser, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-19 1-5 [PDF File]
• R. Kudo, S. Takahashi, K. Takamasu: Design Value Use Type Super-Resolution Optical Inspection for Microfabricated Structure Defects by Using Standing Wave Illumination Shift, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-8 1-4 [PDF File]
• Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Comparison Experiment for Pulse Repetition Interval Based Length Measurement Linked to a Femtosecond Optical Frequency Comb, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-P-2 1-4 [PDF File]
• Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Edge Determination Methodology for Cross-Section STEM Image of Photoresist Feature Used for Reference Metrology, SPIE Advanced Lithography 2013, San Jose, USA, 2013, 868132 1-6 [PDF File]
  
  

• Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Development of high-precision micro-coordinate measuring machine: Multi-probe measurement system for measuring yaw and straightness motion error of XY linear stage, Precision Engineering Vol. 35, No. 2, 2011, 424-430 [PDF File]
• S. Takahashi, R. Kudo, S. Usuki, K. Takamasu: Super resolution optical measurements of nanodefects on Si wafer surface using infrared standing evanescent wave, CIRP Annals - Manufacturing Technology Vol. 60, 2011, 523-526 [PDF File]
• Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy, Precision Engineering Vol. 35, No. 3, 686-692 [PDF File]
• Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Space position measurement using long-path heterodyne interferometer with optical frequency comb, Optics Express Vol. 20, No. 2, 2012, 2725-2732 [PDF File]
• Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Nanometer profile measurement of large aspheric optical surface by scanning deflectometry with rotatable devices: Uncertainty propagation analysis and experiments, Precision Engineering Vol. 36, No. 1, 2012, 91-96 [PDF File]
• Hirokazu Matsumoto, Xiaonan Wang, Kiyoshi Takamasu, Tomohiro Aoto: Absolute Measurement of Baselines up to 403 m Using Heterodyne Temporal Coherence Interferometer with Optical Frequency Comb, Applied Physics Express, 5, 046601, 2012, 1-3 [PDF File]
• Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: A new method for high-accuracy gauge block measurement using 2 GHz repetition mode of a mode-locked fiber laser, Measurement Science and Technology, 23, 054003, 2012, 1-6 [PDF File]
  
  

• Muzheng Xiao, Satomi Jujo, Kiyoshi Takamasu, Satoru Takahashi: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices - Error Analysis and Experiments -, Proc. euspen2011, Como, Italy, 2011, 129-132 [PDF File]
• P. Yang, T. Takamura, S. Takahashi, K. Takamasu, O. Sato, S. Osawa, T. Takatsuji: A motion errors and profile measurement system using three laser interferometers and one autocollimator for a high-precision micro-coordinate measuring machine, Proc. euspen2011, Como, Italy, 2011, 150-153 [PDF File]
• Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Experimental evaluation of long path heterodyne interferometers with optical-frequency comb and continuous-wave laser, Proc. ISMTII2011, Daejeon, Korea, 2011, A4-3, 1-5 [PDF File]
• Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Experimental analysis of influence of error on super-resolution optical inspection using standing wave illumination, Proc. ISMTII2011, Daejeon, Korea, 2011, A5-4, 1-6 [PDF File]
• Guoqing Ding, Xin Chen, Satoru Takahashi, Kiyoshi Takamasu: On-machine profile measurement by multiple sensors scanning method with two kinds of algorithms, Proc. ISMTII2011, Daejeon, Korea, 2011, A7-2, 1-6 [PDF File]
• Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: High accuracy gauge block measurement using 2-GHz repetitions mode of a mode-locked fiber laser, Proc. ISMTII2011, Daejeon, Korea, 2011, B4-1, 1-4 [PDF File]
• Tomohiko Takamura, Ping Yang, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Development of high precision Coordinate Measuring Machine - Uncertainty analysis of multi-probe method, Proc. ISMTII2011, Daejeon, Korea, 2011, D2-5, 1-6 [PDF File]
• Xin Chen, Guoqing Ding, Satoru Takahashi, Kiyoshi Takamasu: Self-calibration for two-dimensional stage using least squares solution, Proc. ISMTII2011, Daejeon, Korea, 2011, E3-1, 1-6 [PDF File]
• Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices, Proc. SPIE Optics + Photonics, San Diego, USA, 2011, 81260R 1-7 [PDF File]
• Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine, Proc. SPIE Optics + Photonics, 2011, San Diego, USA, 81330T 1-7 [PDF File]
• Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Absolute Distance Measurement Using Long-Path Heterodyne Interferometer with Optical Frequency Comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThH3, 1-2 [PDF File]
• Hirokazu Matsumoto, Xiaonan Wang, Dong Wei, Satoshi Takahashi, Kiyoshi Takamasu: Interferometric Estimation of the Offset-Frequency of Optical Frequency Comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThH6, 1-2 [PDF File]
• Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Pulse repetition interval-based excess fraction method for length measurement directly linked to a femtosecond optical frequency comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThU6, 1-2 [PDF File]
• D. Wei, N. Wu, K. Takamasu, H. Matsumoto: Remote internal diameter measurement of ring gauge based on a low-coherence tandem scheme, Proc. ASPEN2011, Hong Kong, China, 2011, P080 1-6 [PDF File]
• Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Sub-nanometer calibration of line width measurement and line edge detection by using STEM and sectional SEM, Proc. SPIE Advanced Lithography 2012, San Jose, USA, 2012, 83240X 1-7 [PDF File]
  
  

• 大西徹，高瀬省徳，高増潔：現場環境における三次元測定機の高度化に関する研究（第3報）−低熱膨張ブロックゲージを用いた温度補正の評価−，精密工学会誌 76(5)，2010， 541-545 [PDF File]
• Kiyoshi Takamasu, Satoru Takahashi, Xin Chen: Uncertainty Estimation in Intelligent Coordinate and Profile Measurement, Key Engineering Materials, Vols. 447-448, 2010, 564-568 [PDF File]
• Ping Yang, Shusaku Shibata, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: A Multi-probe Measurement Method to Evaluate the Yaw and Straightness Errors of XY Stage on High Precision CMM, Key Engineering Materials, Vols. 447-448, 2010, 590-594 [PDF File]
• Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Optical Devices - Error Analysis and Pre-experiment -, Key Engineering Materials, Vols. 447-448, 2010, 604-608 [PDF File]
• S. Takahashi, K. Watanabe, K. Takamasu: A novel resist surface profilometer for next-generation photolithography using mechano-optical arrayed probe system, CIRP Annals - Manufacturing Technology, 59, 2010, 521-524 [PDF File]
• Keisuke Matsuda, Satoru Takahashi1, Kiyoshi Takamasu: Development of In-process Visualization System for Laser-assisted Three-dimensional Microfabrication using Photocatalyst Nanoparticles, International Journal of Precision Engineering and Manufacturing, Vol. 11, No. 6, 2010, 811-815 [PDF File]
• 小谷 潔, 飯田 文明, 小川 雄太郎, 高増 潔, 神保 泰彦：Windkessel modelを用いた姿勢の違いに起因する循環器動態変化の評価，電気学会論文誌C（電子・情報・システム部門誌），Vol. 131, No.1，2011，140-145 [PDF File]
• Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Simulation-Based Analysis of Influence of Error on Super-Resolution Optical Inspection, Int. J. of Automation Technology Vol. 5, No. 2, 2011, 167-172 [PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Theoretical Analysis of Length Measurement Using Interference of Multiple Pulse Trains of a Femtosecond Optical Frequency Comb, Japanese Journal of Applied Physics 50(2), 2011, 022701-1-5 [PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Time-of-flight method using multiple pulse train interference as a time recorder, Optics Express, Vol. 19, No. 6, 2011, 4881-4889 [PDF File]
  
  

• K. Takamasu, K. Kuwabara, S. Takahashi, T. Mizuno, H. Kawada: Sub-nanometer Uncertainty Evaluation of Line Width Measurement by Si Lattice Structures of STEM Image, Proc. of the euspen International Conference, Delft, Netherlands, euspen2010, 2010, 116-119 [PDF File]
• W. Agustinus, A. Hirai, S. Takahashi, K. Takamasu, H. Matsumoto: Improvement of Gauge Block Measurement Without Wringing Using Tandem Low-coherence Interferometer, Proc. of the euspen International Conference, Delft, Netherlands, euspen2010, 2010, 237-240 [PDF File]
• Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Mirror - Enlarging Measuring Range of Autocollimator -, Proc. 10th ISMQC, Osaka, Japan, 2010, B3-017-1-4 [PDF File]
• Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Resolution Characteristics of Super-Resolution Optical Inspection Using Standing Wave Illumination, Proc. 10th ISMQC, Osaka, Japan, 2010, B3-134-1-4 [PDF File]
• Nobuyuki Ohsawa, Hirokazu Matsumoto, Akiko Hirai, Masatoshi Arai, Tohru Shimizu, Takashi Kikuchi: Non-Contact Remote Measurements Of Ring Gauge Using A Low-Coherence Interferometer, Proc. 10th ISMQC, Osaka, Japan, 2010, B4-043 1-4 [PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Advanced Absolute Length Metrology Based On Pulse Trains' Constructive Interference - Towards Measurements of Meter Order with an Accuracy of Nano Order -, Proc. 10th ISMQC, Osaka, Japan, 2010, C1-001-1-4 [PDF File]
• Kazumasa Isaka, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: New Optical Distance Measurement Without a Prism Refractor Using an Optical Frequency Comb Laser, Proc. 10th ISMQC, Osaka, Japan, 2010, D4-062-1-4 [PDF File]
• Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Super-Heterodyne Interferometric Length Measurement Using the Repetition Frequency of an Optical Frequencies Comb, Proc. 10th ISMQC, Osaka, Japan, 2010, E1-047-1-4 [PDF File]
• Ping Yang, Shusaku Shibata, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: A Three Laser Interferometers and One Autocollimator System for Measuring the Yaw and Straightness Errors of a X-Y Stage on High Precision CMM, Proc. 10th ISMQC, Osaka, Japan, 2010, E3-058-1-4 [PDF File]
• Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Height Measurement of a Particle in Evanescent Field Controlling Penetration Depth, Proc. 10th ISMQC, Osaka, Japan, 2010, E5-139-1-4 [PDF File]
• Kiyoshi Takamasu: Uncertainty Estimation for Profile Measurement by Multi-Sensors Method, Proc. 10th ISMQC, Osaka, Japan, Plenary Lecture, 2010 [PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: A novel length measurement interferometer based on a femtosecond optical frequency comb introduced multi-pulse trains’ interference, Proc. EOS 2010, Paris, France, 2010, 3209 [PDF File]
• Satoru Takahashi, Keisuke Matsuda, Hisamichi Yoshigoe, Kiyoshi Takamasu: Laser Direct Fabrication of Three-Dimensional Microstructures Using Photocatalyst Nanoparticles, Proc. of 4th CIRP International Conference of High Performance Cutting 2010, Gifu, Japan, 2010, 381-384 [PDF File]
• Satoru Takahashi, Toshimune Nagano, Yusuke Kajihara, Kiyoshi Takamasu: A Novel Exposure Method Based on Dissolved Oxygen Control for Nano-Stereolithography Using Evanescent Light, Proc. ASPE2010, Atlanta, USA, 2010, 373-376 [PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Femtosecond optical frequency comb's temporal coherence characteristic-based high-accuracy distance measurement, Proc. PGC 2010, Singapore, 2010, 1-6 [PDF File]
• Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Sub-nanometer line width and line profile measurement for CD-SEM calibration by using STEM, Proc. SPIE AL 2011, San Jose, USA, 2011, 7971 797108 1-8 [PDF File]
• Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Calibration for multiple motion errors of X-Y table on micro-coordinate measuring machine (M-CMM) by utilizing multi-probe scanning method, ISUPEN2011, International Symposium on Ultraprecision Engineering and Nanotechnology, Tokyo, Japan, 2011 [PDF File]
• Satoru Takahashi, Takayoshi Oshima, Toshimune Nagano, Yusuke Kajihara, Kiyoshi Takamasu: Dynamic Control of Lateral Evanescent Light Distribution for Microstereolithography, Proc. of the 6th International Conference on Micro Manufacturing, Tokyo, Japan, 2011, 327-330 [PDF File]
• Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring multiple motion errors of X-Y table in micro-coordinate measuring machine, The 3rd GMSI International Symposium, Tokyo, Japan, 2011, 135 [PDF File]
  
  

• Y. Hori, A. Hirai, K. Minoshima, H. Matsumoto: High-accuracy interferometer with a prism pair for measurement of the absolute refractive index of glass, Applied Optics 48 (11), 2009, 2045-2050 [PDF File]
• H. Inaba, Y. Nakajima, FL. Hong, K. Minoshima, J. Ishikawa, A. Onae, H. Matsumoto, M. Wouters, B. Warrington, N. Brown: Frequency Measurement Capability of a Fiber-Based Frequency Comb at 633 nm, IEEE Transactions on Instrumentation and Measurement 58 (4), 2009, 1234-1240[PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Analysis of the temporal coherence function of a femtosecond optical frequency comb, Optics Express 17 (9), 2009, 7011-7018[PDF File]
• Wei Gao, Kiyoshi Takamasu, Yasuhiro Takaya, Satoru Takahashi: Guest Editors of Special Issue: Advances in Intelligent Nano-Measurement Technology, International Journal of Surface Science and Engineering 3 (3), 2009, 157-159[PDF File]
• Satoru Takahashi, Shuichi Minamiguchi, Toshiyuki Nakao, Shin Usuki, Kiyoshi Takamasu: Study on residual resist layer thickness measurement for Nanoimprint Lithography based on near-field optics, International Journal of Surface Science and Engineering 3 (3), 2009, 178-194[PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Simultaneous Observation of High Temporal Coherence between Two Pairs of Pulse Trains Using a Femtosecond-Optical-Frequency-Comb-Based Interferometer, Japanese Journal of Applied Physics 48, 2009, 070211 1-3[PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Femtosecond optical frequency comb-based tandem interferometer, Journal of the European Optical Society 4, 2009, 09042 1-4[PDF File]
• D. Wei, S. Takahashi, K. Takamasu, H. Matsumoto: Experimental observation of pulse trains' destructive interference with a femtosecond optical frequency-comb-based interferometer, Optics Letters 34 (18), 2009, 2775-2777[PDF File]
• S. Usuki, H. Nishioka S. Takahashi, K. Takamasu: Experimental verification of super-resolution optical inspection for semiconductor defect by using standing wave illumination shift, International Journal of Advanced Manufacturing Technology 46 (9-12), 2010 863-865[PDF File]
  
  

• Yoshito Hirata, Fumiaki Iida, Kiyoshi Kotani, Kevin Judd, Kazuyuki Aihara: Identifying coupling types from observed data: a method using recurrence plots, SIAM Conference on Applications of Dynamical Systems 2009, 2009[PDF File]
• S. Takahashi, R. Kudo, S. Okada, S. Usuki, K. Takamasu: Experimental verification of super-resolution microscopy using standing evanescent light with image retrieval, euspen 2009, 2009, 171-174[PDF File]
• Kiyoshi Takamasu, Satoru Takahashi, Wang Tao, Ryoshu Furutani, Makoto Abbe: Uncertainty evaluation for coordinate metrology by intelligent measurement, ISMTII2009, 2009, 1 006-010[PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Study on the Temporal Coherence Function of a Femtosecond Optical Frequency Comb, SPIE Europe Optical Metrology 2009, SPIE 7389, 2009, 73891R 1-8[PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Femtosecond Optical Frequency Comb for Volume Temperature Change Measurement, 8th Pacific Rim Conference on Lasers and Electro-Optics, 2009[PDF File]
• R. Kudo, S. Usuki, S. Takahashi, K. Takamasu: Fundamental Verification for 2-Dimensional Super-Resolution Optical Inspection for Semiconductor Defects by Using Standing Wave Illumination Shift, IMEKO 2009, 2009, 106-111[PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Remote Measurement Using a Femtosecond-Optical-Frequency-Comb-Based Interferometer, Tech. Digest of the Eighth Japan-Finland Joint Symposium on Optics in Engineering, 2009, 31-32[PDF File]
• Winarno Agustinus, Akiko Hirai, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Novel Measurement Technique of Gauge Block Without Wringing Using a Tandem Low-coherence Interferometer, ASPEN2009, 2009, 1A2-5-1807[PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Advanced optical metrology of geometrical quantity based on pulse trains' destructive interference, ASPEN2009, 2009, 1D-13-1890p[PDF File]
• Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu: In-process visualization of laser-assisted three-dimensional microfabrication using photocatalyst nanoparticles, ASPEN2009, 2009, 2C-6-2009-p[PDF File]
• Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Algorithm for 2-Dimensional Super-Resolution Optical Inspection for Semiconductor Defects by Using Standing Wave Illumination, ASPEN2009, 2009, 2D-12-2273-p[PDF File]
• Kazumasa Isaka, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: New optical distance measurement without prism using an optical frequency comb laser, ASPEN2009, 2009, 2P10-3p[PDF File]
• Shin Usuki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Resolving Power Improvement for Optical Nano-Defect Measurement by using Sub-Pixel Sampling based on Structured Illumination Shift Method, ASPEN2009, 2009, 2P10-8p[PDF File]
• Kiyoshi Takamasu, Kazuki Kuwabara, Satoru Takahashi, Takeshi Mizuno, Hiroki Kawada: Sub-nanometer Calibration of CD-SEM Line Width by Using STEM, SPIE Advanced Lithography, SPIE 7638 - 55, 2010, 1-12[PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Application of femtosecond optical frequency comb's temporal coherence character to a distant estimation, 4th Pacific International Conference on Applications of Lasers and Optics (PICALO), 2010[PDF File]
• Satoru Takahashi, Kiyoshi Takamasu: Micro 3-D Fabrication and Nano Scale Metrology by Controlling Localized Light Energy, 4th TU-SNU-UT Joint Symposium, 2010, 12[PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Temporal coherence of a femtosecond optical frequency comb and applied quantity metrology applications, 4th TU-SNU-UT Joint Symposium, 2010, 52[PDF File]
• Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Application of femtosecond optical frequency comb’s temporal coherence characteristic to evaluation of experimental environment, Optics Frontier 2010 Laser Technology Forum and Outstanding Achievements Release Conference of Chinese Optics 2009, LTFO-2010-2017
  
  

• S. Liu, K. Watanabe, S. Takahashi, K. Takamasu: Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System, Key Engineering Materials Vols. 381-382, 2008, 407-410 [PDF File]
• X. Chen, K. Takamasu: Study on Scanning Squareness Measurement Method and Uncertainty Estimation, Key Engineering Materials Vols. 381-382, 2008, 569-572 [PDF File]
• M. Nara, M. Abbe, K. Takamasu: Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data, Key Engineering Materials Vols. 381-382, 2008, 587-590 [PDF File]
• 臼杵深，西岡宏晃，高橋哲，高増潔：変調照明シフトによる超精密加工表面の超解像光学式欠陥計測に関する研究（第1報）−解像特性の理論的検討−，精密工学会誌，74 (5)，2008，498-503 [PDF File]
• 臼杵深，西岡宏晃，高橋哲，高増潔：変調照明シフトによる超精密加工表面の超解像光学式欠陥計測に関する研究（第2報）−定在波照明シフト実験による解像原理の実験的検証−，精密工学会誌，74 (6)，2008，581-586 [PDF File]
• Yusuke Kajihara, Toru Takeuchi, Satoru Takahashi, Kiyoshi Takamasu: Development of an In-process Confocal Positioning System for Nanostereolithography Using Evanescent Light, International Journal of Precision Engineering and Manufacturing, 9 (3), 51-54, 2008[PDF File]
• K. Takamasu, S. Takahashi, M. Abbe, R. Furutani: Uncertainty estimation for coordinate metrology with effects of calibration and form deviation in strategy of measurement, Meas. Sci. Technol. 19 (8), 2008, 084001[PDF File]
• S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu: Theoretical and numerical analysis of lateral resolution improvement characteristics for fluorescence microscopy using standing evanescent light with image retrieval, Meas. Sci. Technol., 19 (8), 2008, 084006[PDF File]
• Hirokazu Matsumoto, Kaoru Sasaki, Akiko Hirai: Remote Measurement of Refractive Index of Air Using Tandem Interferometer over Long Optical Fiber, Japanese Journal of Applied Physics, Vol. 47, No. 9, 2008, 7386-7389[PDF File]
• Hirokazu Matsumoto, Kaoru Sasaki: Remote Measurement of Practival Length Standards Using Optical Fiber Networks and Low-Coherence Interferometers, Japanese Journal of Applied Physics, Vol. 47, No. 11, 2008, 8590-8594[PDF File]
• Shin Usuki, Hiroaki Nishioka, Satoru Takahashi, Kiyoshi Takamasu: Experimental verification of super-resolution optical inspection for semiconductor defects by using standing wave illumination shift, International Journal of Advanced Manufacturing Technology, 2009, DOI:10.1007/s00170-008-1901-y[PDF File]
• Masao Sugi, Ippei Matsumura, Yusuke Tamura, Makoto Nikaido, Jun Ota, Tamio Arai, Kiyoshi Kotani, Kiyoshi Takamasu, Hiromasa Suzuki, Akio Yamamoto, Yoichi Sato, Seiichi Shin, Fumihiko Kimura: Quantitative Evaluation of Automatic Parts Delivery in "Attentive Workbench" Supporting Workers in Cell Production, Journal of Robotics and Mechatronics, Vol.21 No.1, 2009, 135-145[PDF File]
• Shujie Liu, Kentaro Watanabe, Xin Chen, Satoru Takahashi, Kiyoshi Takamasu: Profile measurement of a wide-area resist surface using a multi-ball cantilever system, Precision Engineering 33, 2009, 50-55[PDF File]
  
  

• S. Takahashi, T. Nagao, S. Minamiguchi, S. Usuki, K. Takamasu: Development of residual layer thickness measurement system for nano-imprint lithography based on near-field optics, euspen 2008, 2008, 295-299[PDF File]
• Hirokazu Matsumoto, Akiko Hirai: Remote Measurement of　Lengths by Excess-Fraction Method Using Optical Fiber Networks and Tandem Interferometer, OSA/OFC/NFOEC2009, 2009[PDF File]
• F.Iida, T. Akagawa, T. Hashimoto, Y. Jimbo, K. Takamasu, Y. Kawaguchi, K. Kotani: Evaluation of the interactive computer graphics that reflects cardiac vagal activity estimated in real-time, ASIAGRAPH2008 in Tokyo Proceedings, 2008, 220-223[PDF File]
• K. Kotani, S. Sasada, Y. Kawaguchi, F. Iida: Heart-to-Heart Communication, Entertainment Science /Digital Gallery, ASIAGRAPH2008 in Tokyo Proceedings, 2008, 285[PDF File]
  
  

• K. Kotani, M. Tachibana, K. Takamasu: Respiratory-phase Domain Analysis of Heart Rate Variability can Accurately Estimate Cardiac Vagal Activity during a Mental Arithmetic Task, Methods of Information in Medicine 2007 46 3: 376-385, 2007, 376-385[PDF File]
• 陳欣，小谷潔，高増潔：空間周波数領域2点法に関する研究（第1報）−2組の2点法を組合わせる場合の系統誤差の補正−，精密工学会誌，73（6）, 2007, 653-658[PDF File]
• 大西徹，高瀬省徳，高増潔：現場環境における三次元測定機の高度化に関する研究（第2報）−直角誤差補正−，精密工学会誌，73（7）, 2007, 818-822[PDF File]
• 梶原優介，稲月友一，高橋哲，高増潔：エバネッセント光を利用したナノ光造形法に関する研究（第2報）−定在エバネッセント光を利用した微細周期構造創製−，精密工学会誌，73（8）, 2007, 934-939[PDF File]
• 小谷潔，飯田文明，赤川智洋，斉藤毅，神保泰彦，河口洋一郎，高増潔：体動の影響下におけるリアルタイム副交感神経活動推定法の開発とインタラクティブCGの生成，電気学会論文誌C，127（10）, 2007, 1762-1769[PDF File]
• Kiyoshi Kotani, Kiyoshi Takamasu, Yasuhiko Jimbo, Yoshiharu Yamamoto: Postural-induced phase shift of respiratory sinus arrhythmia and blood pressure variations: insight from respiratory-phase domain analysis, American Journal of Physiology-Heart and Circulatory Physiology 294:1481-1489, 2008, 1481-1489[PDF File]
• Y. Kajihara, Y. Inazuki, T. Takeuchi, S. Takahashi, K. Takamasu: Evanescent light photopolymerization and measurement of cure depth in nanostereolithography, Applied Physics Letters 92, 093120, 2008, 093120 1-3[PDF File]
  
  

• Satoru Takahashi: Study on Micro 3D Fabrication and Nano Scale Metrology Using Localized Light Energy, Proceedings of 2007 U.S.-Japan Young Researchers Exchange Program in Nanotechnology in University of North Carolina at Charlotte, 2007
• X. Chen, K. Kotani, K. Takamasu: Study on Algorithm of Reconstructing Topography Based on Topography Difference, euspen 2007 (Germany), 2007, 365-368
• G. Olea, S. Rathmann, J. Hesselbach, K. Takamasu: Developments for a High Precision Positioning Systems Family with Parallel Structure and Short Planar Motion, euspen 2007 (Germany), 2007, 485-488
• S. Takahashi, M. Okuno, Y. Kajihara, K. Takamasu: Development of laser-assisted microfabrication system for three-dimensional metal structures by photocatalysis, euspen 2007 (Germany), 2007, 529-532
• Satoru Takahashi: Development of TIRF microscopy using standing evanescent light, Proceedings of 2007 U.S.-Japan Young Researchers Exchange Program in Nanotechnology in Tohoku University, 2007
• K. Takamasu, S. Takahashi, M. Abbe, R. Furutani: Uncertainty Estimation for Coordinate Metrology: Calibration, Form Deviation and Strategy of Measurement, ISMTII2007 (Japan), 2007, 1-4
• S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu: Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light, ISMTII2007 (Japan), 2007, 45-48
• Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu: An Optical and Confocal Microscopic System for Nano-stereolithography Using Evanescent Light, ISMTII2007 (Japan), 2007, 79-82
• Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kiyoshi Takamasu: Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System, ISMTII2007 (Japan), 2007, 231-234
• S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu: Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift, ISMTII2007 (Japan), 2007, 387-390
• X. Chen, K. Takamasu: Study on Scanning Squareness Measurement Method and Uncertainty Estimation, ISMTII2007 (Japan), 2007, 437-440
• M. Nara, M. Abbe, K. Takamasu: Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data, ISMTII2007 (Japan), 2007, 815-818
• M. Abbe, M. Nara, K. Takamasu: Uncertainty Evaluation of CMM by Modeling with Spatial Constraint, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 121-125[PDF File]
• S. Minamiguchi, S. Usuki, S. Takahashi, K. Takamasu: Thin Film Thickness Measurement for Evaluation of Residual layer of Nano-Imprint Lithography Using Near-Field Optics, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 167-172[PDF File]
• Kiyoshi Takamasu, Keisuke Yoshida, Tatsuya Senoo, Xin Chen, Kiyoshi Kotani, Satoru Takahashi: Calibration of 6 DOF Parallel Mechanism Driven by Planar Motors, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 178-183[PDF File]
  
  

• Toshie Yoshioka, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi: Study on Particle Detection for Patterned Wafers by Annular Evanescent Light Illumination (1st Report) : Principle of Particle Detection and Verification Experiments, Journal of the Japan Society for Precision Engineering, 72（7），2006，878-883
• Yusuke Kajihara, Yuichi Inazuki, Satoru Takahashi, Kiyoshi Takamasu: Study of Nano-Stereolithography Using Evanescent Light (1st report) - Theoretical and Experimental Analyses -, Journal of the Japan Society for Precision Engineering, 72（11），2006，1391-1396 [PDF File]
• Shujie Liu, Shuichi Nagasawa, Satoru Takahashi, Kiyoshi Takamasu: Development of a Multi-Ball-Cantilever AFM for Measuring Resist Surface, Journal of Robotics and Mechatronics, Vol. 18, No. 6, 2006, 698-704
• Xin CHEN, Kiyoshi TAKAMASU, Kiyoshi KOTANI, Toshihiro ISHIDA: Study on Calibration of Planar Linear Motor (1st Report) - Profile Measurement of the Plane Mirrors -, Journal of the Japan Society for Precision Engineering, 72（12），2006，1542-1546 [PDF File]
• Tohru Ohnishi, Shotoku Takase, Kiyoshi Takamasu: Study on Improvement Methods of CMM (Coordinate Measuring Machine) in Workshop Environment - Evaluation and Correction of Thermal Drift -, Journal of the Japan Society for Precision Engineering, 73（2），2007，270-274 [PDF File]
• K. Kotani, M. Tachibana, K. Takamasu: Investigation of the Influence of Swalloing, Coughing and Vocalizationon Heart Rate Variability with Respiratory-phase Domain Analysis, Methods of Information in Medicine, 46 (2), 2007, 179-185 [PDF File]
  
  

• Gheorghe Olea, Tony Postiau, Benoit Raucent, Kiyoshi Takamasu: A New 4DOF Desktop Parallel Manipulation System (D-PMS) - Kinematic Analysis and Performance Evaluation, 7th National Congress on Theoretical and Applied Mechanics, Mons, Belgium, 2006 [PDF File]
• S. Liu, S. Nagasawa, S. Takahashi, K. Takamasu: Development of Multi-Ball-Cantilever AFM System for Measuring the Profile of Soft Thin Film Surface, Euspen 2006, Baden, Austria, 2006, 462-465 [PDF File]
• Hiroaki Nishioka, Satoru Takahashi, Kiyoshi Takamasu: A Super-Resolution Microscopy with Standing Evanescent Light and Image Reconstruction Method, IMEKO XVIII World Congress, Brazil Rio de Janeiro, 2006 [PDF File]
• Masaki Okuno, Tasuku Aso, Satoru Takahashi, Kiyoshi Takamasu: A Novel Microfabrication Technique for Three-Dimensional Metal Structures by Photocatalysis, ASPE 2006 (21st Annual Meeting), Monterey USA, 2006 [PDF File]
• Yusuke Kajihara, Toru Takeuchi, Satoru Takahashi, Kiyoshi Takamasu: Development of a nano-stereolithography system using evanescent light for submicron fabrication, ASPE 2006 (21st Annual Meeting), Monterey USA, 2006 [PDF File]
• S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu: Development of super-resolution optical inspection system for semiconductor defects using standing wave illumination shift, Proc. of SPIE Vol. 6375, Boston USA, 2006, 637508 [PDF File]
  
  

• Kiyoshi Kotani, Takeshi Saito, Makoto Tachibana, Kiyoshi Takamasu: Workload Control Using the Real-time Extraction of Respiratory Sinus Arrhythmia, Transactions of the Japanese Society for Medical and Biological Engineering, 43 (2), 2005, 252-260
• Kiyoshi TAKAMASU, Osamu SATO, Ken SHIMOJIMA, Ryoshu FURUTANI: Artifact Calibration of Coordinate Measuring Machine (3rd Report) - Estimation of Uncertainty of Measurements After Calibration -, Journal of the Japan Society for Precision Engineering,71（7），2005，890-894 [PDF File]
• Chanin Sinlapeecheewa, Kiyoshi Takamasu: 3D profile measurement using color multi-line stripe pattern with one shot scanning, Integrated Computer-Aided Engineering, 12 (4), 2005, 333-341 [PDF File]
• T. Ha, T. Miyoshi, Y. Takaya, S. Takahashi: Laser Scattering Measurment of Microdefects on Silicon Oxide Wafer, Key Engineering Materials Vols. 295-296, 2005, 3-8
• S. Takahashi, R. Nakajima, T. Miyoshi, Y Takaya, K. Takamasu: Development of an Evanescent Light Measurement System for Si Wafer Microdefect Detection, Key Engineering Materials Vols. 295-296, 2005, 15-20
• S. Usuki, K. Enami, M. Hiraki, S. Takahashi, K. Takamasu: Theoretical Analysis and Basic Experiments for the 3D Displacement Measurement Using Ring-Shaped Laser Beam, Key Engineering Materials Vols. 295-296, 2005, 295-300
• X. Chen, K. Takamasu, M. Nikaidou: Evaluation of Thrust Force and Positioning Accuracy of a New Linear Motor, Key Engineering Materials Vols. 295-296, 2005, 613-618
• Kiyoshi Kotani, Zbigniew R. Struzik, Kiyoshi Takamasu, H. Eugene Stanley, Yoshiharu Yamamoto: Model for complex heart rate dynamics in health and diseases, Physical Review E, Vol. 72, 041904, 2005, 1-8 [PDF File]
• Kiyoshi Takamasu, Makoto Abbe, Ryoshu Furutani, Shigeo Ozono: Estimation of Uncertainty in Feature Based Metrology (3rd Report) - Form Deviation Model of Line Feature by Piecewise Polynomial -, Journal of the Japan Society for Precision Engineering，71（11），2005，1454-1458 [PDF File]
• Ichiko Misumi, Satoshi Gonda, Tomizo Kurosawa, Yasushi Azuma, Toshiyuki Fujimoto, Isao Kojima, Toshihisa Sakurai, Tadahiro Ohmi, Kiyoshi Takamasu: Reliability of parameters of associated base straight line in step height samples: Uncertainty evaluation in step height measurements using nanometrological AFM, Precision Engineering, 30, 2006, 13-22 [PDF File]
• Shin USUKI, HOU Bing, Keitaro KIYOSAWA, Kazuhiro ENAMI, Masahiko HIRAKI, Satoru TAKAHASHI, Kiyoshi TAKAMASU, Shigeo OZONO: Three Dimensional Displacement Measurement Using Ring Beam - Improvement of Nonlinearity by Ellipse Approximation of Ring Image -, Journal of the Japan Society for Precision Engineering, 72（1），2006，132-136 [PDF File]
• Masao Sugi, Yusuke Tamura, Makoto Nikaido, Jun Ota, Tamio Arai, Kiyoshi Takamasu, Kiyoshi Kotani, Akio Yamamoto, Hiromasa Suzuki, Yoichi Sato, Fumihiko Kimura, Seiichi Shin: Human Supporting Production Cell "Attentive Workbench", Intelligent Autonomous Systems 9 (IAS-9), edited by T. Arai et al., IOS Press, 2006, 740-747
• Mihoko Otake, Ryo Fukano, Shinji Sako, Masao Sugi, Kiyoshi Kotani, Junya Hayashi, Hiroshi Noguchi, Ryuichi Yondea, Kenjiro Taura, Nobuyuki Otsu, Tomomasa Sato: Autonomous Collaborative Environment for Project Based Learning, Intelligent Autonomous Systems 9 (IAS-9), edited by T. Arai et al., IOS Press, 2006, 756-763
• Gheorghe Olea, Kiyoshi Takamasu, Benoit Raucent: Precision Multi-Degrees-Of-Freedom Positioning Systems - Modular Design For Assembly Applications -, Precision Assembly Technologies for Mini and Micro Products, edited by Svetan Ratchev (IFIP (International Federation for Information Processing) series Vol. 198), 2006 [same as IPAS 2006]　[PDF File]
  
  

• Masao Sugi, Makoto Nikaido, Yusuke Tamura, Jun Ota, Tamio Arai, Kiyoshi Kotani, Kiyoshi Takamasu, Seiichi Shin, Hiromasa Suzuki, Yoichi Sato: Motion Control of Self-Moving Trays for Human Supporting Production Cell "Attentive Workbench", Proc. of the 2005 IEEE International Conference on Robotics and Automation (ICRA 2005) (Barcelona, Spain), 2005, 4091-4096
• S. Usuki, T. Nakano, S. Takahashi, K. Takamasu: Computer Simulation of Nano-Void Inspection in Low-k Dielectric Materials Using Near-Field Optics, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 85-88
• R. Furutani, K. Shimojima, K. Takamasu: Self-Calibration of CMM with Redundant Degree of Freedom, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 173-176 [PDF File]
• G. Olea, O. Sato, H. Kiyosawa, S. Takahashi, K. Takamasu: Experimental Method and Device for Spherical Joints Accuracy Evaluation, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 475-478
• Makoto Nikaido, Masao Sugi, Yusuke Tamura, Jun Ota, Tamio Arai, Kiyoshi Kotani, Kiyoshi Takamasu, Akio Yamamoto, Seiichi Shin, Hiromasa Suzuki, Yoichi Sato: Arrangement Planning for Multiple Self-Moving Trays in Human Supporting Production Cell "Attentive Workbench", Proc. of the 2005 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2005) (Edmonton, Canada), 2005, 3880-3885
• K Takamasu, O Sato, K Shimojima, S Takahashi, R Furutani: Estimation of uncertainty of measurements of 3D mechanisms after kinematic calibration, ISMTII2005 (Huddersfield, UK), Sep 6-8, 2005 [PDF File]
• K. Kotani, M. Tachibana, K. Takamasu: Investigation of the influence of swalloing, coughing, and vocalization on heart rate variability with respiratory-phase domain analysis, Proc. of the IFMBE/IMIA 5th Interanational Workshop on Biosignal Intarpretation（Tokyo, Japan), 2005, 17-20 [PDF File]
• Satoru Takahashi, Yuichi Inazuki, Yusuke Kajihara, Kiyoshi Takamasu: Photofabrication of Periodic Submicron Structures Using Standing Evanescent Light for Nano-Stereolithography, 20th Annual ASPE Meeting (Oct 9-14, 2005, Norfolk, Virginia, USA), 2005, 1729-1732 [PDF File]
• S Liu, S Nagasawa, S Takahashi, K Takamasu: Profile Measurement of Resist Surface Using Multi-Ball-Cantilever AFM, Proc. of SPIE International Symposium on Optomechatronic Technologies (ISOT 2005) (December, Sapporo) Vol.6049, 2005, 604903-1-9
• S. Uski, H. Nishioka, S. Takahashi, K. Takamasu: Super-resolution optical inspection for semiconductor defects using standing wave shift, Proc. of SPIE International Symposium on Optomechatronic Technologies (ISOT 2005) (December, Sapporo) Vol.6049, 2005, 60490C-1-11
• Gheorghe Olea, Kiyoshi Takamasu, Benoit Raucent: Precision Multi-Degrees-Of-Freedom Positioning Systems - Modular Design For Assembly Applications -, International Precision Assembly Seminar 2006 (IPAS 2006), (Bad Hofgastein, Austria, 19-22 February 2006), 2006, 251-262 [PDF File]
  
  

• A. Taguchi, T. Miyoshi, Y. Takaya, S. Takahashi: Optical 3D profilometer for in-process measurement of microsurface based on phase retrieval technique, Precision Engineering，28（2）, 2004, 152-163 pdf file
• Osamu Sato, Kiyoshi Takamasu, Itaru Murui, Gheorghe Olea: Development of Micro Milling Machine Using Parallel Mechanism (Part 1, Design Parameters and Prototype), Journal of Japan Scociety for Design Engineering, 39 (4), 2004, 175-181
• Kiyoshi TAKAMASU, Osamu SATO, Chanin SINLAPEECHEEWA, Ken SHIMOJIMA, Ryoshu FURUTANI: Artifact Calibration of Coordinate Measuring Machine (2nd Report) – Self Calibration of Redundant Coordinate Measuring Machine –, Journal of the Japan Society for Precision Engineering, 70 (5), 2004, 711-715 (Japanese) pdf file
• O. Sato, K. Shimojima, R. Furutani, K. Takamasu: Artifact calibration of parallel mechanism, kinematic calibration with a priori knowledge, Measurement Science and Technology, 15(6), 2004, 1158-1165 (Japanese) pdf file
• Kiyoshi Kotani, Kenta Furukawa, Kiyoshi Takamasu: Respiratory Phase Domain Analysis of the Influence Swallowing Has on the Heart Rate Variability, Transactions of the Japanese Society for Medical and Biological Engineering, 42 (2), 2004, 61-65 (Japanese) pdf file
• Jonghan Jin, I. Misumi, S. Gonda, T. Kurosawa: Pitch measurement of 150 nm 1d-Grating standards using an nano-metrological atomic force microscope, Int. Journal for the Korean Society of Precision Engineering, 5(3), 2004, 19-25
• Taeho Keem, S. Gonda, I. Misumi, Qiangxian Huang, T. Kurosawa: Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems, Applied Optics，43（12）, 2004, 2443-2448 pdf file
  
  

• X. Chen, K. Kotani, S. Takahashi, K. Takamasu: Development of Multiple Small Linear Planar Motor System, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 - June 2), 2004, 252-253 pdf file
• S. Usuki, K. Enami, O. Sato, S. Takahashi, K. Takamasu: Improving the Accuracy of 3D Displacement Measurement using Ring-Shaped Laser Beam and High Resolution CCD, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 - June 2), 2004, 328-329 pdf file
• T. Yoshioka, T. Miyoshi, Y. Takaya, S. Takahashi: Study on Particle Detection for Patterned Wafers by Evanescent Light Illumination, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 - June 2), 2004, 338-339 pdf file
• O. Sato, K. Shimojima, G. Olea, R. Furutani, K. Takamasu: Full Parameter Calibration of Parallel Mechanism, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 - June 2), 2004, 396-397 pdf file
• M. Sugi, Y. Tamura, J. Ota, T. Arai, K. Takamasu, K. Kotani, H. Suzuki, Y. Sato: Attentive workbench: An intelligent production cell supporting human workers, 7th International Symposium on Distributed Autonomous Robotic Systems (DARS 04) (Toulouse, France 23-25 June), 2004, 441-450
• S. Takahashi, R. Nakajima, T. Miyoshi, Y. Takaya, T. Yoshioka, T. Hariyama, K. Kimura, T. Nakao, K. Takamasu: Nano-Defects Inspection of Semiconductor Wafer using Evanescent Wave, International Symposium on Photonics in Measurement, 23/24 June, Frankfurt, Germany, 2004, 307-316 (Plenary Presentation)
• M. Sugi, Y. Tamura, J. Ota, T. Arai, K. Kotani, H. Suzuki, K. Takamasu, Y. Sato: Distributed control of multiple self-moving trays for an Intelligent cell production system, Proc. of The SICE Annual Conf. 2004 (Spporo, Japan, 4-6 Aug), 2004, 2506-2511
• R. Furutani, K. Shimojima, K. Takamasu: Parameter Calibration for non-Cartesian CMM, 8th International Symposium on Measurement and Quality Control in Production (ISMQC2004) (Oct 12-15, 2004, Erlangen, Germany), 2004, 317-326 (Plenary Presentation, Excellent paper 1st Prize) PDF file
• K. Takamasu, S. Koga, S. Takahashi, M. Abbe, R. Furutani S. Ozono: Evaluation of Uncertainty by Form Deviations of Measured Workpieces in Specified Measuring Strategies, 8th International Symposium on Measurement and Quality Control in Production (ISMQC2004) (Oct 12-15, 2004, Erlangen, Germany), 2004, 535-540 PDF file
• Y. Kajihara, Y. Inazuki, S. Takahashi, K. Takamasu: Study of Nano-Stereolithography Using Evanescent Light, American Society for Precision Engineering (ASPE2004Annual Meeting, Florida, USA, Oct. 24 - 29), 2004, 149-152
  
  

• I. Misumi, S. Gonda, T. Kurosawa, Y. Tanimura, N. Ochiai, J. Kitta, F. Kubota, M. Yamada, Y. Fujiwara, Y. Nakayama, K. Takamasu: Submicrometre-pitch intercomparison between optical diffraction, scanning electron microscope and atomic force microscope, Meas. Sci. Technol., 14 (12)  2003, 2065-2074 PDF File
• I. Misumi, S. Gonda, T. Kurosawa, K. Takamasu: Uncertaity in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope, Meas. Sci. Technol., 14 (4) 2003, 463-471
• M. Abbe, K. Takamasu, S. Ozono: Reliability on calibration of CMM, Measurement,  33 (4) 2003, 359-368 PDF File
• Taeho Ha, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi: Size determination of microscratches on silicon oxide wafer surface using scattered light, Precision Engineering, 27（3） 2003, 265-272
• K. Kotani, K. Furukawa, K. Takamasu: Accurate Extraction of Respiratory Sinus Arrhythmia with Respect to Respiratory Information, Transactions of the Japanese Society for Medical and Biological Engineering, 41（3） 2003, 197-204 (Japanese)
• H. Nishino, T. Miyoshi, Y. Takaya, S. Takahashi, T. Hayashi, K. Kimura: Study on Nonlaminate Micro Stereolithography using LCD Mask (2nd Report) - Thin Layere Laminating Fabrication using LCD Live-motion Mask -, Journal of the Japan Society for Precision Engineering, 69（10） 2003, 1417-1422 (Japanese)
• T. Nakajima, S. Takahashi, T. Miyoshi, Y. Takaya: Study on Defects Detection in Near-Surface Layer of Silicon Wafer by Using Infrared Evanescent Light (1st Report) - Theoretical, Experimental Discussions -, Journal of the Japan Society for Precision Engineering, 69（9） 2003, 1291-1295 (Japanese)
• K. Enami, S. Usuki, M. Hiraki, S. Takahashi, K. Takamasu: Three Dimensional Displacement Measurement Using Ring Beam - Theoretical Analysis and Basic Experiments -, Journal of the Japan Society for Precision Engineering, 69（12） 2003, 1764-1768 (Japanese) PDF File
• K. Takamasu, K. Nosaka, M. Abbe, R. Furutani, S. Ozono: Estimation of Uncertainty in Feature Based Metrology (2nd Report) - Uncertainty from Form Deviations in Circle Measurement -, Journal of the Japan Society for Precision Engineering, 69（5） 2003, 693-697 (Japanese) PDF File
• K. Shimojima, R. Furutani, S. Ozono, K. Takamasu, M. Hiraki, K. Araki: The Estimation Method of Uncertainty of Coordinate Measuring Machine (1st Report) - The Estimation of Kinematical Parameter and Uncertainty of Articulated Three-Dimensional Coordinate Measuring Machine -, Journal of the Japan Society for Precision Engineering, 69（6） 2003, 841-845 (Japanese)
• C. Kuo, K. Takamasu, A. Yamamoto, T. Wada, K. Sunouchi, K. Kase, H. Tashiro: Signal Processing for Wavelenth Scanning Interferometer, Journal of the Japan Society for Precision Engineering, 69（6） 2003, 831-835 (Japanese)
• K. Takamasu, K. Shimojima, R. Furutani, O. Sato: Artifact Calibration of Coordinate Measuring Machine (1st Report) - Kinematic Calibration -, Journal of the Japan Society for Precision Engineering, 69（6） 2003, 851-855 (Japanese) PDF File
• O. Sato, K. Shimojima, R. Furutani, K. Takamasu: Artifact Calibration of Parallel Mechanism (1st Report) - Kinematic Calibration with a Priori Knowledge -, Journal of the Japan Society for Precision Engineering, 70（1） 2004, 96-100 (Japanese)
• O. Sato, G. Olea, M. Hiraki, K. Takamasu: Calibration of Parallel Coordinate Measuring Machine - Kinematic Calibration with Multi-Links -, Journal of the Japan Society for Precision Engineering, 70（2） 2004, 214-218 (Japanese) PDF File
  
  

• Panart Khajornrungruang, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi, Takashi Harada, Soichiro Isago: T Novel Edge Profile Measurement of Micro Cutting Tool by Laser Diffraction, Proceedings of the euspen International Topical Conference (May, Aachen, Germany), 2003, 463-466
• M. Fujiwara, K. Takamasu, S. Ozono: Evaluation of Properties of Nano-CMM by Thermal Drift and Tilt Angle, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1794-1797 PDF File
• R. Furutani, K. Shimojima, K. Takamasu: Kinematical Calibration of Articulated CMM Using Multiple Simple Artifacts, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1798-1801
• R. Nakajima, T. Miyoshi, Y. Takaya, S. Takahashi: Internal Defect Detection in the Vicinity of SI Wafer Surface Using Evanescent Wave, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1819-1822
• K. Takamasu, K. Nosaka, M. Abbe, R. Furutani, S. Ozono: Estimation of Uncertainty From Unknown Systematic Errors in Coordinate Metrology, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1834-1837 PDF File
• A. Taguchi, T. Miyoshi, Y. Takaya, S. Takahashi: High Precision Instrument for Micro Surface Profile Measurement Based on Optical Inverse Scattering Phase Method, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1838-1841
• K. Shimojima, R. Furutani, K. Takamasu, K. Araki: The Estimation Method of Uncertainty of Articulated Coordinate Measuring Machine, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1844-1847
• K. Kotani, K. Takamasu, L. Safonov, Y. Yamamoto: Multifractal heart rate dynamics in human cardiovascular model, Proceedings of SPIE 5110 (June), 2003, 340-347
• Keiichi Kimura, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi: New planarization method assisted by aggregated particles created with optical radiation pressure, The 2nd Annual UA-JSPE CMP Workshop(July, Arizona), 2003, 1-5
• Keiichi Kimura, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi: New planarization method assisted by particle aggregation with optical radiation pressure, The 21th Korea-CMPUGM for New Technology in CMP (Aug., Korea), 2003, 107-111
• H. Suzuki, F. Kimura, T. Arai, K. Takamasu, J. Ota, A. Yamamoto, K. Kotani, M. Sugi: An Overview of Attentive Workbench (AWB), Symposium on Real World Information Systems (Sept., Tokyo), 2003, 65-66
• K. Kotani: What information can we obtain from the vital sensor?, Symposium on Real World Information Systems (Sept., Tokyo), 2003, 67-68
• I. Misumi, S. Gonda, Qiangxian Huang, Taeho Keem, T. Kurosawa, K. Takamasu: Development of nanometrological, dimensional standards in NMIJ, PProc. Korea-Japan Joint Symp. on Nanoengineering 2003（Nov., Korea）, 2003, 123-126
• Taeho Keem, S. Gonda, I. Misumi, Qiangxian Huang T. Kurosawa: Simple method for reducing the nonlinearity of a homodyne interferometer with a quadrature detector system, Proc. Korea-Japan Joint Symp. on Nanoengineering 2003（Nov., Korea）, 2003, 332-335
• J. Wang, T. Miyoshi, Y. Takaya, S. Takahashi, Y. Maeno: Detection of defects on the paint panel surface of a car body using laser scattering method, Proceedings of the International Conference on Leading Edge Manufacturing in 21st Century (LEM21)(Nov., Niigata), 2003, 125-128
• R. Tsujio, T. Miyoshi, Y. Takaya, S. Takahashi, K. Kimura: Fundamental properties of chemical mechanical polishing for Copper layer assisted by optical radiation pressure, Proceedings of the International Conference on Leading Edge Manufacturing in 21st Century (LEM21)(Nov., Niigata), 2003, 11-14
• T. Yoshioka, T. Miyoshi, Y. Takaya, S. Takahashi, K. Takamasu: Study on particle detection for patterned wafers by evanescent light illumination -evanescent light scattering simulation by means of FDTD method-, Proceedings of the International Conference on Leading Edge Manufacturing in 21st Century (LEM21)(Nov., Niigata), 2003, 129-132