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国際会議の予稿などです．


学術講演（国際会議）：2016年度
  • Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Evanescent Light Exposing System under Nitrogen Purge for Nano-Stereolithography, 18th CIRP Conference on Electro Physical and Chemical Machining, Tokyo, Japan, Procedia CIRP 42, 2016, 77-80
  • Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Precision absolute distance measurement technique onto rough surface object using self-beat signals of optical frequency comb, euspen2016, 16th International Conference & Exhibition, Nottingham, UK, 2016, P1.25
  • Yuki Iwaki, Satoru Takahashi, Kiyoshi Takamasu: Development of 3D form measurement of semiconductor structure - Measurement of FinFET profile using TEM and CD-SEM images, euspen2016, 16th International Conference & Exhibition, Nottingham, UK, 2016, P1.52
  • Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: High-sensitive Optical Detection of Fine Particulate Defects by Autonomous Searching Liquid Probe: Observation of Dynamic Interaction with Defects, CLEO2016, Conference on Lasers and Electro-Optics, San Jose, USA, 2016, ATu3J.4
  • Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Development of non-destructive optical depth measurement of sub-diffraction limit fine holes, nanoMan2016, 5th International Conference on Nanomanufacturing, Macau, China, 2016, 1-4
  • Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: Proposal of in-process measurement for micro-stereolithography using surface plasmon resonance, LANE2016, 9th International Conference on Photonic Technologies, Physics Procedia 83, 2016, 964-970
  • Satru Takahashi: (Invited Presentation) Challenge of Evanescent Light Exposing Microstereolithography, JSAP-OSA Joint Symposia 2016, Niigata, Japan, 2016, 14p-C301-1
  • Shuzo Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Theoretical analysis of improved back-focal-plane interferometry for monitoring nanoparticle position, ASPE2016, 31st ASPE Annual Meeting, Portland, USA, 2016, 136-139
  • Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Omnidirectional one-shot exposure micro-stereolithography for biomimetic hemisphere with micro structured surface, ASPE2016, 31st ASPE Annual Meeting, Portland, USA, 2016, 407-410
  • Xicheng Wang, Muzheng Xiao, Chao Wang, Xin Jin, Zhijing Zhang, Kiyoshi Takamasu: Distance measurement for rotation center to measurement table using triangulation method, Chinese Society for Optical Engineering Conferences, Proc. of SPIE 10255, 2016, 102553W1-10
  • Deqing Kong, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: A tunable surface-plasmon-resonance substrate for in-process measurement of micro-stereolithography, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, B6-5
  • Shuzou Masui, Yosuke Horita, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Improved back-focal-plane interferometry for monitoring nanoparticle position, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, C2-3
  • Kazuki Tachibana, Shouhei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Optical detection of fine particulate defects by autonomous searching liquid probe: Theoretical design of high sensitive phase detection system, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, C2-4
  • Bohuai Chu, Masaki Michihata, Kohei Hayashi, Kiyoshi Takamasu, Satoru Takahashi: Calibration of refractive index in microsphere diameter measurement based on analysis of polarized whispering gallery mode, ISOT2016, International Symposium on Optomechatronics Technologies, Itabashi, Tokyo, Japan, 2016, C5-3
  • Tatsuya Kume, Tsutomu Mibe, Shoichiro Nishimura, Mikio Sakurai, Yutaro Satoh, Wiroj Sudatham, Kiyoshi Takamasu, Hiromasa Yasuda: Precise alignment monitor by using optical frequency comb for the muon g-2/EDM experiment at J-PARC, IWAA2016, International Workshop on Accelerator Alignment, Grenoble, France, 2016
  • Chengshuo Jin, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Non-Destructive Optical Depth Inspection of Sub-Diffraction Limit Fine Holes -Theoretical analysis of optical responses based on FDTD method-, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Japan, 2016, A317-8233
  • Yuki Suzuki, Kunikazu Suzuki, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Fabrication of Functional Microstructures by Multi-Beam Interference Lithography Using Evanescent Light, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Japan, 2016, B103-8177
  • Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: In-process measurement for micro-stereolithography using surface plasmon resonance, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Japan, 2016, P47-8252
  • Kazuki Tachibana, Shohei Asai, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Optical Detection of Fine Particulate Defects with Autonomous Search-and-split Liquid Probe -Characteristics analysis of optical detection-, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Shizuoka, Japan, 2016, A307-8210
  • Fuminori Kimura, Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Non-contact Precision Profile Measurement to Rough Surface Objects with Optical Frequency Combs, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Shizuoka, Japan, 2016, A312-8209
  • Yuki Iwaki, Kiyoshi Takamasu, Satoru Takahashi: Development of Advanced Measurement Method of 3D Semiconductor Structure - 3D-Profile Measurement of FinFET using CD-SEM and TEM Images -, ICPE2016, 16th International Conference on Precision Engineering, Hamamatsu, Shizuoka, Japan, 2016, A315-8166
  • Winarno Agustinus, Shusei Masuda, Satoru Takahashi, Hirokazu Matsumoto, Kiyoshi Takamasu, Takao Kitayama, Ryota Kudo, Katsuyoshi Endo: Non-Contact Remote Measurement of Internal Distance Between Two Plane Mirrors by Using a Tandem Low-Coherence Interferometer, ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications, Hong Kong, China, 2017
  • Kiyoshi Takamasu: (Keynote) High-Accuracy Absolute Length Measurement Using Optical-Comb Pulsed Interferometer and Its Application for Verification of Coordinate Measuring Machines, ASPEN/ASPE 2017, Spring Topical Meeting Manufacture and Metrology of Structured and Freeform Surfaces for Functional Applications, Hong Kong, China, 2017, 1-4
  • Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota: 3D-Profile Measurement of Advanced Semiconductor Features by Using FIB as Reference Metrology, SPIE Advanced Lithography, San Jose, USA, 2017, 10145-67

学術講演（国際会議）：2015年度
  • Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Absolute precision measurement for space coordinates metrology using an optical-comb pulsed interferometer with a ball lens target, 15th euspen International Conference (euspen2015)，Leuven, Belgium, 2015, 109-110
  • Chen Meiyun, Genki Miyazaki, Satoru Takahashi, Kiyoshi Takamasu: Roundness measurement machine using multi-beam angle sensor - experimental verification of multi-beam angle sensor, 15th euspen International Conference (euspen2015), Leuven, Belgium, 2015, 125-126
  • Jonggang Kim, Masaki Michihata, Yasuhiro Takaya: Experimental study on measurement the surface topography by laser trapping probe, 6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015), Harbin, China, 119 1-6
  • Yosuke Horita, Shotaro Kadoya, Masaki Michihata, Kiyoshi Takamasu, Satoru Takahashi: Fundamental study on fabrication of multi-functional micro device based on micro-beads using photocatalytic reaction, 6th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2015), Harbin, China, 120 1-4
  • Satoru Takahashi: (Plenary Keynote) Challenge of Spatial Resolution Improvement of Optical Measurement Method Based on Localized Light Energy, 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei, Taiwan, 2015, 9
  • Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: (Invited Paper) Non-contact precision profile measurement to rough surface objects with optical frequency combs, 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei, Taiwan, 2015, 1079 1-5
  • Hiromasa Kume, Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Super-Resolution Optical Measurement Method Using Standing Wave Illumination with Three-Beam Interference, 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei, Taiwan, 2015, 1094 1-6
  • Yumi Iwago, Tomohiko Takamura, Yohan Kondo, Youichi Bitou, Satoru Takahashi, Kiyoshi Takamasu: Self Calibration Method for Nanometer Profile Measurement on Large Aspheric Optical Surface, 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei, Taiwan, 2015, 1097 1-6
  • Akifumi Kawasaki, Masaki Michihata, Atsushi Adachi, Yasuhiro Takaya: Accurate diameter measurement of microsphere based on analysis for polarization of whipering gallery mode resonance, 12th International Symposium on Measurement Technology and Intelligent Instruments (ISMTII 2015), Taipei, Taiwan, 2015, 1140 1-6
  • Kazuki Tachibana, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: High-sensitive optical measurement of fine particulate defects on Si wafer surface with liquid probe, 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Kyoto Research Park, Kyoto, 2015
  • Yuki Suzuki, Hiroyuki Tahara, Masaki Michihata, Satoru Takahashi, Kiyoshi Takamasu: Improvement of lateral shape controlling with nitrogen purge for nano-stereolithography using evanescent light, 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Kyoto Research Park, Kyoto, 2015
  • Masafumi Asahi, Masaki Michihata, Yasuhiro Takaya: Analysis of chemical reaction in Cu-CMP with reactive nanoparticles based on Raman spectra enhanced by surface plasmon, 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Kyoto Research Park, Kyoto, 2015
  • Yasuhiro Takaya, Masaki Michihata, Sinichi Ueda: Optically trapped microprobe for nano-profile measurement based on interpolation method of standing wave scale using chromatic confocal system, IMEKO XXI world congress, Prague, Czech, 2015
  • Masaki Michihata, Akifumi Kawasaki, Atsushi Adachi, Yasuhiro Takaya: Measurement of micro-sphere diameter based on whispering gallery mode, IMEKO XXI world congress, Prague, Czech, 2015
  • Kenji Maruno, Masaki Michihata, Yasuhiro Mizutani, Yasuhiro Takaya: On-machine measurement of cutting tool edge profile by detecting fluorescence from cutting fluid, International Symposium on Optomechatronic Technologies (ISOT2015), Neuchatel, Switzerland, 2015, 03003 p1-p5
  • Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Gian F. Lorusso, Naoto Horiguchi: 3D-Profile Measurement of Advanced Semiconductor Features by Reference Metrology, SPIE Advanced Lithography 2016, San Jose, USA, 2016, 9778 1-4

学術講演（国際会議）：2014年度
  • Satoru Takahashi, Hiroyuki Tahara, Kodai Miyakawa, Kiyoshi Takamasu: Fundamental study on the world's thinnest layered micro-stereolithography using evanescent light, 2014 ASPE Spring Topical Meeting, Dimensional Accuracy and Surface Finish in Additive Manufacturing, Berkeley, USA, 2014
  • Kiyoshi Takamasu, Kyohei Ishikawa, Tomihiko Takamura, Muzheng Xiao, Satoru Takahashi: Nanometer Profile Measurement of Aspheric Surface Using Scanning Deflectometry and Rotating Autocollimator: Self-Calibration Method of Autocollimator, ASPE/ASPEN Summer Topical Meeting 58, Hawaii, USA, 2014, 121-125
  • Taro Onoe, Zongluo Yang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Precision measurement technique for rough surface object using self-beat signals of optical frequency comb, 14th euspen International Conference (euspen 2014), Dubrovnik, Croatia, 2014, 181-184
  • Hiroyuki Tahara, Kodai Miyakawa, Satoru Takahashi, Kiyoshi Takamasu, Toshimune Nagano: Theoretical Analysis of Spatial Process Resolution of Evanescent Light Exposure for Nano-stereolithography, 15th International Conference on Precision Engineering (ICPE2014), Kanazawa, Japan, 2014, 340-343
  • Fumiya Kaji, Yuki Yamaguchi, Satoru Takahashi, Kiyoshi Takamasu: Analysis of TiO2 nanotool handling characteristics for microplastic structures based on laser trapping technique, 15th International Conference on Precision Engineering (ICPE2014), Kanazawa, Japan, 2014, 760-761
  • Hirokazu Matsumoto, Kiyoshi Takamasu: Absolute Length-Measuring System by Automatic Interference-Fringe-Peak Detection with Optical-Comb Fiber Interferometer, 11th Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI2014), Tsukuba, Japan, 2014, A21
  • Wiroj Sudatham, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Non-Contact Measurement Technique for Dimensional Metrology Using Optical Comb, 11th Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI2014), Tsukuba, Japan, 2014, A25
  • Meiyun Chen, Soichiro Ueda, Satoru Takahashi, Kiyoshi Takamasu: Measurement of Surface Roundness Using a Multi-Beam Angle Sensor, 11th Laser Metrology for Precision Measurement and Inspection in Industry (LMPMI2014), Tsukuba, Japan, 2014, B02
  • Hirokazu Matsumoto, Kiyoshi Takamasu: Distance Measurement Using Temporal-Coherence Interferometer with Optical Frequency Comb and Fiber Etalons, Frontiers in Optics, Tucson, USA, 2014,
  • Kiyoshi Takamasu, Yuuki Iwaki, Satoru Takahashi, Hiroki Kawada, Masami Ikota, Atsuko Yamaguchi, Gian F. Lorusso, Naoto Horiguchi: Line Profile Measurement of Advanced-FinFET Features by Reference Metrology, Proc. of SPIE 9424, SPIE Advanced Lithography, San Jose, USA, 2015, 942406-1

学術講演（国際会議）：2013年度
  • H. Yoshigoe, S. Takahashi, K. Takamasu: Experimental Analysis of Laser-Assisted Microfabrication Using TiO2 Nanoparticles, Proceedings of the 13th euspen International Conference (euspen2013), Berlin, Germany, 2013, 80-83
  • Hiroki Yokozeki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Study on Lateral Resolution Improvement of Laser-Scanning Imaging for Nano Defects Inspection, 11th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2013), Aachen, Germany, 2013
  • Kyohei Ishikawa, Tomohiko Takamura, Muzheng Xiao, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement on Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Autocollimator - Error Analysis and Measurement Experiments by Using Autocollimator with Wide Measuring Range -, 11th International Symposium of Measurement Technology and Intelligent Instruments (ISMTII2013), Aachen, Germany, 2013
  • Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Non-contact precision distance measurement technique using two optical frequency combs, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
  • Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: High-accuracy calibration of CMM using temporal-coherence fiber interferometer with fast-repetition comb laser, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
  • Yuki Yamaguchi, Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu: Study on Photocatalyzed Nano-removal Processing Tool for Microstereolithography, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
  • Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu: Line Width and Line Profile Measurement of Photoresist Using STEM Images, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
  • Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Length Traceability using Optical Frequency Comb, 5th International Conference of Asian Society for Precision Engineering and Nanotechnology (ASPEN2013), Taipei, Taiwan, 2013
  • Ryota Kudo, Hiroki Yokozeki, Satoru Takahashi, Kiyoshi Takamasu: Coherent Imaging Algorithm of Super-Resolution Optical Inspection with Structured Light Shift, 7th International Conference on Leading Edge Manufacturing in 21st Century (LEM21), Matsushima, Japan, 2013, 177-181
  • K. Miyakawa, R. Matsuzawa, S. Takahashi, K. Takamasu: Development of Hybrid Nano-Stereolithography System Using Evanescent Light and Propagating Light for High Throughput Fabrication, 28th Annual Meeting of the American Society for Precision Engineering (ASPE2013), St. Paul, Minnesota, USA, 2013
  • Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Sidewall Roughness and Line Profile Measurement of Photoresist and FinFET Features by Cross-Section STEM Image for Reference Metrology, Proc. SPIE 9050, SPIE Advanced Lithography 2014, San Jose, USA, 2014, 90501K-1-7

学術講演（国際会議）：2012年度
  • Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotation Devices -Development of Three Dimensional Measuring Facility and Experiment-, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 137-140
  • X. N. Wang, S. Takahashi, K. Takamasu, H. Matsumoto: Super-heterodyne Interferometer for Length-Measurement Using the Beat Signal of Laser Diodes and the Optical Frequency Comb, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 259-262
  • Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Length measurement based on Pulse repetition interval of a femtosecond optical frequency comb, Proceedings of the 12th euspen International Conference, Stockholm, Sweden, 2012, 268-271
  • Muzheng Xiao, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface with Improved Deflectometry Method - Principle Introduction and Experimental Verification -, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, SS2-O-3 1-4
  • H. Matsumoto, X. Wang, K. Takamasu: Absolute Measurement of Base Lines up to 400 m Using Temporal Coherence Heterodyne Interferometer of Optical Frequency Comb, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-12 1-4
  • K. Takamasu, S. Takahashi, R. Furutani, M. Abbe: Round Robin Tests of Uncertainty Estimation for Coordinate Metrology by Software Error Propagation, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-15 1-4
  • C. Narin, S. Takahashi, K. Takamasu, H. Matsumoto: Step Gauge Measurement Using High-Frequency Repetitions of a Mode-Locked Fiber Laser, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-19 1-5
  • R. Kudo, S. Takahashi, K. Takamasu: Design Value Use Type Super-Resolution Optical Inspection for Microfabricated Structure Defects by Using Standing Wave Illumination Shift, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-O-8 1-4
  • Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Comparison Experiment for Pulse Repetition Interval Based Length Measurement Linked to a Femtosecond Optical Frequency Comb, XX IMEKO World Congress IMEKO2012, Busan, Korea, 2012, TC14-P-2 1-4
  • Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Edge Determination Methodology for Cross-Section STEM Image of Photoresist Feature Used for Reference Metrology, SPIE Advanced Lithography 2013, San Jose, USA, 2013, 868132 1-6
  • Satoru Takahashi: Super-Resolution Visual Inspection for Microstructures Manufacturing, The 3rd International Conference on Digital Manufacturing & Automation, Guilin, Chaina, 2012
  • Takahiro Sekino, Satoru Takahashi, Kiyoshi Takamasu: Fundamental study on nanoremoval processing method for microplastic structures using photocatalyzed oxidation, ICPE2012，Hyougo, Japan, 2012（論文7と同じ）
  • Kenta Matsui, Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: New Non-contact Measurement of Small Inside-diameter Using Tandem Low-coherence Interferometer and Optical Fiber Devices, ICPE2012, Hyougo, Japan, 2012（論文8と同じ）
  • Taro Onoe, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Development of a non-contact precision measurement technique using optical frequency combs, ICPE2012，Hyougo, Japan, 2012（論文9と同じ）
  • Haruki Okito, Satoru Takahashi, Kiyoshi Takamasu: Sub-Nanometer Line Width and Line Profile Measurement Using STEM Images with Metal Coating, ICPE2012, Hyougo, Japan, 2012（論文10と同じ）
  • S. Takahashi, J. Li, P. Herman: Laser erasing of ultrafast lase written optical waveguides in fused silica glass, Photonic West, Feb.4, San Francisco, USA, 2012

学術講演（国際会議）：2011年度
  • Muzheng Xiao, Satomi Jujo, Kiyoshi Takamasu, Satoru Takahashi: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices - Error Analysis and Experiments -, Proc. euspen2011, Como, Italy, 2011, 129-132
  • P. Yang, T. Takamura, S. Takahashi, K. Takamasu, O. Sato, S. Osawa, T. Takatsuji: A motion errors and profile measurement system using three laser interferometers and one autocollimator for a high-precision micro-coordinate measuring machine, Proc. euspen2011, Como, Italy, 2011, 150-153
  • Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Experimental evaluation of long path heterodyne interferometers with optical-frequency comb and continuous-wave laser, Proc. ISMTII2011, Daejeon, Korea, 2011, A4-3, 1-5
  • Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Experimental analysis of influence of error on super-resolution optical inspection using standing wave illumination, Proc. ISMTII2011, Daejeon, Korea, 2011, A5-4, 1-6
  • Guoqing Ding, Xin Chen, Satoru Takahashi, Kiyoshi Takamasu: On-machine profile measurement by multiple sensors scanning method with two kinds of algorithms, Proc. ISMTII2011, Daejeon, Korea, 2011, A7-2, 1-6
  • Narin Chanthawong, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: High accuracy gauge block measurement using 2-GHz repetitions mode of a mode-locked fiber laser, Proc. ISMTII2011, Daejeon, Korea, 2011, B4-1, 1-4
  • Tomohiko Takamura, Ping Yang, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Development of high precision Coordinate Measuring Machine - Uncertainty analysis of multi-probe method, Proc. ISMTII2011, Daejeon, Korea, 2011, D2-5, 1-6
  • Xin Chen, Guoqing Ding, Satoru Takahashi, Kiyoshi Takamasu: Self-calibration for two-dimensional stage using least squares solution, Proc. ISMTII2011, Daejeon, Korea, 2011, E3-1, 1-6
  • Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Nanometer Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Devices, Proc. SPIE Optics + Photonics, San Diego, USA, 2011, 81260R 1-7
  • Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Multi-probe system comprising three laser interferometers and one autocollimator for measuring flat bar mirror profile with nanometer accuracy on a high-precision micro-coordinate measuring machine, Proc. SPIE Optics + Photonics, 2011, San Diego, USA, 81330T 1-7
  • Xiaonan Wang, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Absolute Distance Measurement Using Long-Path Heterodyne Interferometer with Optical Frequency Comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThH3, 1-2
  • Hirokazu Matsumoto, Xiaonan Wang, Dong Wei, Satoshi Takahashi, Kiyoshi Takamasu: Interferometric Estimation of the Offset-Frequency of Optical Frequency Comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThH6, 1-2
  • Dong Wei, Kiyoshi Takamasu, Hirokazu Matsumoto: Pulse repetition interval-based excess fraction method for length measurement directly linked to a femtosecond optical frequency comb, Proc. FIO/LS, OSA, San Jose, USA, 2011, FThU6, 1-2
  • D. Wei, N. Wu, K. Takamasu, H. Matsumoto: Remote internal diameter measurement of ring gauge based on a low-coherence tandem scheme, Proc. ASPEN2011, Hong Kong, China, 2011, P080 1-6
  • Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Sub-nanometer calibration of line width measurement and line edge detection by using STEM and sectional SEM, Proc. SPIE Advanced Lithography 2012, San Jose, USA, 2012, 83240X 1-7

学術講演（国際会議）：2010年度
  • K. Takamasu, K. Kuwabara, S. Takahashi, T. Mizuno, H. Kawada: Sub-nanometer Uncertainty Evaluation of Line Width Measurement by Si Lattice Structures of STEM Image, Proc. of the euspen International Conference, Delft, Netherlands, euspen2010, 2010, 116-119 [PDF File]
  • W. Agustinus, A. Hirai, S. Takahashi, K. Takamasu, H. Matsumoto: Improvement of Gauge Block Measurement Without Wringing Using Tandem Low-coherence Interferometer, Proc. of the euspen International Conference, Delft, Netherlands, euspen2010, 2010, 237-240 [PDF File]
  • Muzheng Xiao, Satomi Jujo, Satoru Takahashi, Kiyoshi Takamasu: Profile Measurement of Large Aspheric Optical Surface by Scanning Deflectometry with Rotatable Mirror - Enlarging Measuring Range of Autocollimator -, Proc. 10th ISMQC, Osaka, Japan, 2010, B3-017-1-4 [PDF File]
  • Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Resolution Characteristics of Super-Resolution Optical Inspection Using Standing Wave Illumination, Proc. 10th ISMQC, Osaka, Japan, 2010, B3-134-1-4
  • Nobuyuki Ohsawa, Hirokazu Matsumoto, Akiko Hirai, Masatoshi Arai, Tohru Shimizu, Takashi Kikuchi: Non-Contact Remote Measurements Of Ring Gauge Using A Low-Coherence Interferometer, Proc. 10th ISMQC, Osaka, Japan, 2010, B4-043 1-4 [PDF File]
  • Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Advanced Absolute Length Metrology Based On Pulse Trains' Constructive Interference - Towards Measurements of Meter Order with an Accuracy of Nano Order -, Proc. 10th ISMQC, Osaka, Japan, 2010, C1-001-1-4 [PDF File]
  • Kazumasa Isaka, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: New Optical Distance Measurement Without a Prism Refractor Using an Optical Frequency Comb Laser, Proc. 10th ISMQC, Osaka, Japan, 2010, D4-062-1-4 [PDF File]
  • Hirokazu Matsumoto, Satoru Takahashi, Kiyoshi Takamasu: Super-Heterodyne Interferometric Length Measurement Using the Repetition Frequency of an Optical Frequencies Comb, Proc. 10th ISMQC, Osaka, Japan, 2010, E1-047-1-4 [PDF File]
  • Ping Yang, Shusaku Shibata, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: A Three Laser Interferometers and One Autocollimator System for Measuring the Yaw and Straightness Errors of a X-Y Stage on High Precision CMM, Proc. 10th ISMQC, Osaka, Japan, 2010, E3-058-1-4 [PDF File]
  • Takayuki Kurihara, Ryuichi Sugimoto, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Height Measurement of a Particle in Evanescent Field Controlling Penetration Depth, Proc. 10th ISMQC, Osaka, Japan, 2010, E5-139-1-4
  • Kiyoshi Takamasu: Uncertainty Estimation for Profile Measurement by Multi-Sensors Method, Proc. 10th ISMQC, Osaka, Japan, Plenary Lecture, 2010 [PDF File]
  • Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: A novel length measurement interferometer based on a femtosecond optical frequency comb introduced multi-pulse trains’ interference, Proc. EOS 2010, Paris, France, 2010, 3209 [PDF File]
  • Satoru Takahashi, Keisuke Matsuda, Hisamichi Yoshigoe, Kiyoshi Takamasu: Laser Direct Fabrication of Three-Dimensional Microstructures Using Photocatalyst Nanoparticles, Proc. of 4th CIRP International Conference of High Performance Cutting 2010, Gifu, Japan, 2010, 381-384
  • Satoru Takahashi, Toshimune Nagano, Yusuke Kajihara, Kiyoshi Takamasu: A Novel Exposure Method Based on Dissolved Oxygen Control for Nano-Stereolithography Using Evanescent Light, Proc. ASPE2010, Atlanta, USA, 2010, 373-376
  • Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Femtosecond optical frequency comb's temporal coherence characteristic-based high-accuracy distance measurement, Proc. PGC 2010, Singapore, 2010, 1-6 [PDF File]
  • Kiyoshi Takamasu, Haruki Okitou, Satoru Takahashi, Mitsuru Konno, Osamu Inoue, Hiroki Kawada: Sub-nanometer line width and line profile measurement for CD-SEM calibration by using STEM, Proc. SPIE AL 2011, San Jose, USA, 2011, 7971 797108 1-8 [PDF File]
  • Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Calibration for multiple motion errors of X-Y table on micro-coordinate measuring machine (M-CMM) by utilizing multi-probe scanning method, ISUPEN2011, International Symposium on Ultraprecision Engineering and Nanotechnology, Tokyo, Japan, 2011 [PDF File]
  • Satoru Takahashi, Takayoshi Oshima, Toshimune Nagano, Yusuke Kajihara, Kiyoshi Takamasu: Dynamic Control of Lateral Evanescent Light Distribution for Microstereolithography, Proc. of the 6th International Conference on Micro Manufacturing, Tokyo, Japan, 2011, 327-330
  • Ping Yang, Tomohiko Takamura, Satoru Takahashi, Kiyoshi Takamasu, Osamu Sato, Sonko Osawa, Toshiyuki Takatsuji: Multi-probe scanning system comprising three laser interferometers and one autocollimator for measuring multiple motion errors of X-Y table in micro-coordinate measuring machine, The 3rd GMSI International Symposium, Tokyo, Japan, 2011, 135 [PDF File]

学術講演（国際会議）：2009年度
  • Yoshito Hirata, Fumiaki Iida, Kiyoshi Kotani, Kevin Judd, Kazuyuki Aihara: Identifying coupling types from observed data: a method using recurrence plots, SIAM Conference on Applications of Dynamical Systems 2009, 2009[PDF File]
  • S. Takahashi, R. Kudo, S. Okada, S. Usuki, K. Takamasu: Experimental verification of super-resolution microscopy using standing evanescent light with image retrieval, euspen 2009, 2009, 171-174
  • Kiyoshi Takamasu, Satoru Takahashi, Wang Tao, Ryoshu Furutani, Makoto Abbe: Uncertainty evaluation for coordinate metrology by intelligent measurement, ISMTII2009, 2009, 1 006-010[PDF File]
  • Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Study on the Temporal Coherence Function of a Femtosecond Optical Frequency Comb, SPIE Europe Optical Metrology 2009, SPIE 7389, 2009, 73891R 1-8[PDF File]
  • Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Femtosecond Optical Frequency Comb for Volume Temperature Change Measurement, 8th Pacific Rim Conference on Lasers and Electro-Optics, 2009[PDF File]
  • R. Kudo, S. Usuki, S. Takahashi, K. Takamasu: Fundamental Verification for 2-Dimensional Super-Resolution Optical Inspection for Semiconductor Defects by Using Standing Wave Illumination Shift, IMEKO 2009, 2009, 106-111
  • Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Remote Measurement Using a Femtosecond-Optical-Frequency-Comb-Based Interferometer, Tech. Digest of the Eighth Japan-Finland Joint Symposium on Optics in Engineering, 2009, 31-32[PDF File]
  • Winarno Agustinus, Akiko Hirai, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Novel Measurement Technique of Gauge Block Without Wringing Using a Tandem Low-coherence Interferometer, ASPEN2009, 2009, 1A2-5-1807[PDF File]
  • Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Advanced optical metrology of geometrical quantity based on pulse trains' destructive interference, ASPEN2009, 2009, 1D-13-1890p[PDF File]
  • Keisuke Matsuda, Satoru Takahashi, Kiyoshi Takamasu: In-process visualization of laser-assisted three-dimensional microfabrication using photocatalyst nanoparticles, ASPEN2009, 2009, 2C-6-2009-p[PDF File]
  • Ryota Kudo, Shin Usuki, Satoru Takahashi, Kiyoshi Takamasu: Algorithm for 2-Dimensional Super-Resolution Optical Inspection for Semiconductor Defects by Using Standing Wave Illumination, ASPEN2009, 2009, 2D-12-2273-p
  • Kazumasa Isaka, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: New optical distance measurement without prism using an optical frequency comb laser, ASPEN2009, 2009, 2P10-3p[PDF File]
  • Shin Usuki, Ryota Kudo, Satoru Takahashi, Kiyoshi Takamasu: Resolving Power Improvement for Optical Nano-Defect Measurement by using Sub-Pixel Sampling based on Structured Illumination Shift Method, ASPEN2009, 2009, 2P10-8p
  • Kiyoshi Takamasu, Kazuki Kuwabara, Satoru Takahashi, Takeshi Mizuno, Hiroki Kawada: Sub-nanometer Calibration of CD-SEM Line Width by Using STEM, SPIE Advanced Lithography, SPIE 7638 - 55, 2010, 1-12[PDF File]
  • Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Application of femtosecond optical frequency comb's temporal coherence character to a distant estimation, 4th Pacific International Conference on Applications of Lasers and Optics (PICALO), 2010[PDF File]
  • Satoru Takahashi, Kiyoshi Takamasu: Micro 3-D Fabrication and Nano Scale Metrology by Controlling Localized Light Energy, 4th TU-SNU-UT Joint Symposium, 2010, 12
  • Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Temporal coherence of a femtosecond optical frequency comb and applied quantity metrology applications, 4th TU-SNU-UT Joint Symposium, 2010, 52[PDF File]
  • Dong Wei, Satoru Takahashi, Kiyoshi Takamasu, Hirokazu Matsumoto: Application of femtosecond optical frequency comb’s temporal coherence characteristic to evaluation of experimental environment, Optics Frontier 2010 Laser Technology Forum and Outstanding Achievements Release Conference of Chinese Optics 2009, LTFO-2010-2017

学術講演（国際会議）：2008年度
  • S. Takahashi, T. Nagao, S. Minamiguchi, S. Usuki, K. Takamasu: Development of residual layer thickness measurement system for nano-imprint lithography based on near-field optics, euspen 2008, 2008, 295-299
  • Hirokazu Matsumoto, Akiko Hirai: Remote Measurement of　Lengths by Excess-Fraction Method Using Optical Fiber Networks and Tandem Interferometer, OSA/OFC/NFOEC2009, 2009[PDF File]
  • F.Iida, T. Akagawa, T. Hashimoto, Y. Jimbo, K. Takamasu, Y. Kawaguchi, K. Kotani: Evaluation of the interactive computer graphics that reflects cardiac vagal activity estimated in real-time, ASIAGRAPH2008 in Tokyo Proceedings, 2008, 220-223[PDF File]
  • K. Kotani, S. Sasada, Y. Kawaguchi, F. Iida: Heart-to-Heart Communication, Entertainment Science /Digital Gallery, ASIAGRAPH2008 in Tokyo Proceedings, 2008, 285[PDF File]
  • 松本弘一：日本の計量標準の現状と今後／e-trace，第5回日韓中計量・測定協力セミナー，2008

学術講演（国際会議）：2007年度
  • Satoru Takahashi: Study on Micro 3D Fabrication and Nano Scale Metrology Using Localized Light Energy, Proceedings of 2007 U.S.-Japan Young Researchers Exchange Program in Nanotechnology in University of North Carolina at Charlotte, 2007
  • X. Chen, K. Kotani, K. Takamasu: Study on Algorithm of Reconstructing Topography Based on Topography Difference, euspen 2007 (Germany), 2007, 365-368
  • G. Olea, S. Rathmann, J. Hesselbach, K. Takamasu: Developments for a High Precision Positioning Systems Family with Parallel Structure and Short Planar Motion, euspen 2007 (Germany), 2007, 485-488
  • S. Takahashi, M. Okuno, Y. Kajihara, K. Takamasu: Development of laser-assisted microfabrication system for three-dimensional metal structures by photocatalysis, euspen 2007 (Germany), 2007, 529-532
  • Satoru Takahashi: Development of TIRF microscopy using standing evanescent light, Proceedings of 2007 U.S.-Japan Young Researchers Exchange Program in Nanotechnology in Tohoku University, 2007
  • K. Takamasu, S. Takahashi, M. Abbe, R. Furutani: Uncertainty Estimation for Coordinate Metrology: Calibration, Form Deviation and Strategy of Measurement, ISMTII2007 (Japan), 2007, 1-4
  • S. Takahashi, S. Okada, H. Nishioka, S. Usuki, K. Takamasu: Analysis of Lateral Resolution Improvement for Fluorescence Microscopy using Standing Evanescent Light, ISMTII2007 (Japan), 2007, 45-48
  • Y. Kajihara, T. Takeuchi, S. Takahashi, K. Takamasu: An Optical and Confocal Microscopic System for Nano-stereolithography Using Evanescent Light, ISMTII2007 (Japan), 2007, 79-82
  • Shujie Liu, Kentaro Watanabe, Satoru Takahashi, Kiyoshi Takamasu: Intelligent Profile Measurement for Wide-Area Resist Surface Using Multi-Sensor AFM System, ISMTII2007 (Japan), 2007, 231-234
  • S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu: Experimental Verification for Super-resolution Optical Inspection for Semiconductor Defect by using Standing Wave Illumination Shift, ISMTII2007 (Japan), 2007, 387-390
  • X. Chen, K. Takamasu: Study on Scanning Squareness Measurement Method and Uncertainty Estimation, ISMTII2007 (Japan), 2007, 437-440
  • M. Nara, M. Abbe, K. Takamasu: Uncertainty Estimation Using Monte-Carlo Method Constrained by Correlations of the Data, ISMTII2007 (Japan), 2007, 815-818
  • M. Abbe, M. Nara, K. Takamasu: Uncertainty Evaluation of CMM by Modeling with Spatial Constraint, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 121-125[PDF File]
  • S. Minamiguchi, S. Usuki, S. Takahashi, K. Takamasu: Thin Film Thickness Measurement for Evaluation of Residual layer of Nano-Imprint Lithography Using Near-Field Optics, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 167-172[PDF File]
  • Kiyoshi Takamasu, Keisuke Yoshida, Tatsuya Senoo, Xin Chen, Kiyoshi Kotani, Satoru Takahashi: Calibration of 6 DOF Parallel Mechanism Driven by Planar Motors, 9th International Symposium on Measurement and Quality Control (ISMQC 2007, India), 2007, 178-183[PDF File]

学術講演（国際会議）：2006年度
  • Gheorghe Olea, Tony Postiau, Benoit Raucent, Kiyoshi Takamasu: A New 4DOF Desktop Parallel Manipulation System (D-PMS) - Kinematic Analysis and Performance Evaluation, 7th National Congress on Theoretical and Applied Mechanics, Mons, Belgium, 2006 [PDF File]
  • S. Liu, S. Nagasawa, S. Takahashi, K. Takamasu: Development of Multi-Ball-Cantilever AFM System for Measuring the Profile of Soft Thin Film Surface, Euspen 2006, Baden, Austria, 2006, 462-465 [PDF File]
  • Hiroaki Nishioka, Satoru Takahashi, Kiyoshi Takamasu: A Super-Resolution Microscopy with Standing Evanescent Light and Image Reconstruction Method, IMEKO XVIII World Congress, Brazil Rio de Janeiro, 2006
  • Masaki Okuno, Tasuku Aso, Satoru Takahashi, Kiyoshi Takamasu: A Novel Microfabrication Technique for Three-Dimensional Metal Structures by Photocatalysis, ASPE 2006 (21st Annual Meeting), Monterey USA, 2006
  • Yusuke Kajihara, Toru Takeuchi, Satoru Takahashi, Kiyoshi Takamasu: Development of a nano-stereolithography system using evanescent light for submicron fabrication, ASPE 2006 (21st Annual Meeting), Monterey USA, 2006
  • S. Usuki, H. Nishioka, S. Takahashi, K. Takamasu: Development of super-resolution optical inspection system for semiconductor defects using standing wave illumination shift, Proc. of SPIE Vol. 6375, Boston USA, 2006, 637508
学術講演（国際会議）：2005年度
  • Masao Sugi, Makoto Nikaido, Yusuke Tamura, Jun Ota, Tamio Arai, Kiyoshi Kotani, Kiyoshi Takamasu, Seiichi Shin, Hiromasa Suzuki, Yoichi Sato: Motion Control of Self-Moving Trays for Human Supporting Production Cell "Attentive Workbench", Proc. of the 2005 IEEE International Conference on Robotics and Automation (ICRA 2005) (Barcelona, Spain), 2005, 4091-4096
  • S. Usuki, T. Nakano, S. Takahashi, K. Takamasu: Computer Simulation of Nano-Void Inspection in Low-k Dielectric Materials Using Near-Field Optics, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 85-88
  • R. Furutani, K. Shimojima, K. Takamasu: Self-Calibration of CMM with Redundant Degree of Freedom, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 173-176 [PDF File]
  • G. Olea, O. Sato, H. Kiyosawa, S. Takahashi, K. Takamasu: Experimental Method and Device for Spherical Joints Accuracy Evaluation, Proc. of 5th International conference of the european society for precision engineering and nanotechnology (euspen 2005) (May 8-11, Montpellier, France), 2005, 475-478
  • Makoto Nikaido, Masao Sugi, Yusuke Tamura, Jun Ota, Tamio Arai, Kiyoshi Kotani, Kiyoshi Takamasu, Akio Yamamoto, Seiichi Shin, Hiromasa Suzuki, Yoichi Sato: Arrangement Planning for Multiple Self-Moving Trays in Human Supporting Production Cell "Attentive Workbench", Proc. of the 2005 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2005) (Edmonton, Canada), 2005, 3880-3885
  • K Takamasu, O Sato, K Shimojima, S Takahashi, R Furutani: Estimation of uncertainty of measurements of 3D mechanisms after kinematic calibration, ISMTII2005 (Huddersfield, UK), Sep 6-8, 2005 [PDF File]
  • K. Kotani, M. Tachibana, K. Takamasu: Investigation of the influence of swalloing, coughing, and vocalization on heart rate variability with respiratory-phase domain analysis, Proc. of the IFMBE/IMIA 5th Interanational Workshop on Biosignal Intarpretation（Tokyo, Japan), 2005, 17-20 [PDF File]
  • Satoru Takahashi, Yuichi Inazuki, Yusuke Kajihara, Kiyoshi Takamasu: Photofabrication of Periodic Submicron Structures Using Standing Evanescent Light for Nano-Stereolithography, 20th Annual ASPE Meeting (Oct 9-14, 2005, Norfolk, Virginia, USA), 2005, 1729-1732 [PDF File]
  • S Liu, S Nagasawa, S Takahashi, K Takamasu: Profile Measurement of Resist Surface Using Multi-Ball-Cantilever AFM, Proc. of SPIE International Symposium on Optomechatronic Technologies (ISOT 2005) (December, Sapporo) Vol.6049, 2005, 604903-1-9
  • S. Uski, H. Nishioka, S. Takahashi, K. Takamasu: Super-resolution optical inspection for semiconductor defects using standing wave shift, Proc. of SPIE International Symposium on Optomechatronic Technologies (ISOT 2005) (December, Sapporo) Vol.6049, 2005, 60490C-1-11
  • Gheorghe Olea, Kiyoshi Takamasu, Benoit Raucent: Precision Multi-Degrees-Of-Freedom Positioning Systems - Modular Design For Assembly Applications -, International Precision Assembly Seminar 2006 (IPAS 2006), (Bad Hofgastein, Austria, 19-22 February 2006), 2006, 251-262 [PDF File]

学術講演（国際会議）：2004年度
  • X. Chen, K. Kotani, S. Takahashi, K. Takamasu: Development of Multiple Small Linear Planar Motor System, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 - June 2), 2004, 252-253 pdf file
  • S. Usuki, K. Enami, O. Sato, S. Takahashi, K. Takamasu: Improving the Accuracy of 3D Displacement Measurement using Ring-Shaped Laser Beam and High Resolution CCD, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 - June 2), 2004, 328-329 pdf file
  • T. Yoshioka, T. Miyoshi, Y. Takaya, S. Takahashi: Study on Particle Detection for Patterned Wafers by Evanescent Light Illumination, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 - June 2), 2004, 338-339 pdf file
  • O. Sato, K. Shimojima, G. Olea, R. Furutani, K. Takamasu: Full Parameter Calibration of Parallel Mechanism, 4th International Conference of the European Society for Precision Engineering and Nanotechnology (euspen2004, Glasgow, UK, May 31 - June 2), 2004, 396-397 pdf file
  • M. Sugi, Y. Tamura, J. Ota, T. Arai, K. Takamasu, K. Kotani, H. Suzuki, Y. Sato: Attentive workbench: An intelligent production cell supporting human workers, 7th International Symposium on Distributed Autonomous Robotic Systems (DARS 04) (Toulouse, France 23-25 June), 2004, 441-450
  • S. Takahashi, R. Nakajima, T. Miyoshi, Y. Takaya, T. Yoshioka, T. Hariyama, K. Kimura, T. Nakao, K. Takamasu: Nano-Defects Inspection of Semiconductor Wafer using Evanescent Wave, International Symposium on Photonics in Measurement, 23/24 June, Frankfurt, Germany, 2004, 307-316 (Plenary Presentation)
  • M. Sugi, Y. Tamura, J. Ota, T. Arai, K. Kotani, H. Suzuki, K. Takamasu, Y. Sato: Distributed control of multiple self-moving trays for an Intelligent cell production system, Proc. of The SICE Annual Conf. 2004 (Spporo, Japan, 4-6 Aug), 2004, 2506-2511
  • R. Furutani, K. Shimojima, K. Takamasu: Parameter Calibration for non-Cartesian CMM, 8th International Symposium on Measurement and Quality Control in Production (ISMQC2004) (Oct 12-15, 2004, Erlangen, Germany), 2004, 317-326 (Plenary Presentation, Excellent paper 1st Prize) PDF file
  • K. Takamasu, S. Koga, S. Takahashi, M. Abbe, R. Furutani S. Ozono: Evaluation of Uncertainty by Form Deviations of Measured Workpieces in Specified Measuring Strategies, 8th International Symposium on Measurement and Quality Control in Production (ISMQC2004) (Oct 12-15, 2004, Erlangen, Germany), 2004, 535-540 PDF file
  • Y. Kajihara, Y. Inazuki, S. Takahashi, K. Takamasu: Study of Nano-Stereolithography Using Evanescent Light, American Society for Precision Engineering (ASPE2004Annual Meeting, Florida, USA, Oct. 24 - 29), 2004, 149-152

学術講演（国際会議）：2003年度
  • Panart Khajornrungruang, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi, Takashi Harada, Soichiro Isago: T Novel Edge Profile Measurement of Micro Cutting Tool by Laser Diffraction, Proceedings of the euspen International Topical Conference (May, Aachen, Germany), 2003, 463-466
  • M. Fujiwara, K. Takamasu, S. Ozono: Evaluation of Properties of Nano-CMM by Thermal Drift and Tilt Angle, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1794-1797 PDF File
  • R. Furutani, K. Shimojima, K. Takamasu: Kinematical Calibration of Articulated CMM Using Multiple Simple Artifacts, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1798-1801
  • R. Nakajima, T. Miyoshi, Y. Takaya, S. Takahashi: Internal Defect Detection in the Vicinity of SI Wafer Surface Using Evanescent Wave, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1819-1822
  • K. Takamasu, K. Nosaka, M. Abbe, R. Furutani, S. Ozono: Estimation of Uncertainty From Unknown Systematic Errors in Coordinate Metrology, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1834-1837 PDF File
  • A. Taguchi, T. Miyoshi, Y. Takaya, S. Takahashi: High Precision Instrument for Micro Surface Profile Measurement Based on Optical Inverse Scattering Phase Method, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1838-1841
  • K. Shimojima, R. Furutani, K. Takamasu, K. Araki: The Estimation Method of Uncertainty of Articulated Coordinate Measuring Machine, Proc. XVII IMEKO World Congress (June, Dobrovnik, Croatia), 2003, 1844-1847
  • K. Kotani, K. Takamasu, L. Safonov, Y. Yamamoto: Multifractal heart rate dynamics in human cardiovascular model, Proceedings of SPIE 5110 (June), 2003, 340-347
  • Keiichi Kimura, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi: New planarization method assisted by aggregated particles created with optical radiation pressure, The 2nd Annual UA-JSPE CMP Workshop(July, Arizona), 2003, 1-5
  • Keiichi Kimura, Takashi Miyoshi, Yasuhiro Takaya, Satoru Takahashi: New planarization method assisted by particle aggregation with optical radiation pressure, The 21th Korea-CMPUGM for New Technology in CMP (Aug., Korea), 2003, 107-111
  • H. Suzuki, F. Kimura, T. Arai, K. Takamasu, J. Ota, A. Yamamoto, K. Kotani, M. Sugi: An Overview of Attentive Workbench (AWB), Symposium on Real World Information Systems (Sept., Tokyo), 2003, 65-66
  • K. Kotani: What information can we obtain from the vital sensor?, Symposium on Real World Information Systems (Sept., Tokyo), 2003, 67-68
  • I. Misumi, S. Gonda, Qiangxian Huang, Taeho Keem, T. Kurosawa, K. Takamasu: Development of nanometrological, dimensional standards in NMIJ, PProc. Korea-Japan Joint Symp. on Nanoengineering 2003（Nov., Korea）, 2003, 123-126
  • Taeho Keem, S. Gonda, I. Misumi, Qiangxian Huang T. Kurosawa: Simple method for reducing the nonlinearity of a homodyne interferometer with a quadrature detector system, Proc. Korea-Japan Joint Symp. on Nanoengineering 2003（Nov., Korea）, 2003, 332-335
  • J. Wang, T. Miyoshi, Y. Takaya, S. Takahashi, Y. Maeno: Detection of defects on the paint panel surface of a car body using laser scattering method, Proceedings of the International Conference on Leading Edge Manufacturing in 21st Century (LEM21)(Nov., Niigata), 2003, 125-128
  • R. Tsujio, T. Miyoshi, Y. Takaya, S. Takahashi, K. Kimura: Fundamental properties of chemical mechanical polishing for Copper layer assisted by optical radiation pressure, Proceedings of the International Conference on Leading Edge Manufacturing in 21st Century (LEM21)(Nov., Niigata), 2003, 11-14
  • T. Yoshioka, T. Miyoshi, Y. Takaya, S. Takahashi, K. Takamasu: Study on particle detection for patterned wafers by evanescent light illumination -evanescent light scattering simulation by means of FDTD method-, Proceedings of the International Conference on Leading Edge Manufacturing in 21st Century (LEM21)(Nov., Niigata), 2003, 129-132

学術講演（国際会議）：2002年度
  • O. Sato, H. Ishikawa, M. Hiraki, K. Takamasu: The Calibration of Parallel-CMM: Parallel-Coordinate Measuring Machine, euspen2002（アイントホーヘン，5月）, 2002, 573-576 PDF File
  • I. Misumi, S. Gonda, T. Kurosawa, Y. Tanimura, N. Ochiai, J. Kitta, F. Kubota, M. Yamada, Y. Fujiwara, Y. Nakayama, K. Takamasu: Comparing Measurements of 1D-Grating Samples Using Optical Diffraction Technique, CD-SEM and nanometrological AFM, euspen2002（アイントホーヘン，5月），2002, 517-520 PDF File
  • R. Furutani, K. Shimojima, K. Takamasu: Parameter Calibration of Articulated CMM, euspen2002（アイントホーヘン，5月）, 2002, 605-608 PDF File
  • M. Abbe, K. Takamasu: Modelling of Spatial Constraint in CMM Error for Uncertainty Estimation, euspen2002（アイントホーヘン，5月）, 2002, 637-640 PDF File
  • Gheorghe Olea, Osamu Sato, Kyoshi Takamasu: Parallel CMM - A New Development: Mechanical Design and Calibraiton Resutls, Proceedings of the 33rd ISR (International Symposium on Robotics) （スウェーデン，10月）, 2002, 221-229 PDF File
  • C. Sinlapeecheewa and K. Takamasu: 3D Profile Measurement by Color Pattern Projection and System Calibration, IEEE ICIT’02, （バンコク，12月）, 2002, 405-410 PDF File
  • K. Takamasu, I. Murui, O. Sato, G. Olea and R. Furutani: Calibration of Three Dimensional Mechanism - Novel Calibration Method for 3DOF Parallel Mechanism -, IEEE ICIT’02, （バンコク，12月）, 2002, 394-398 PDF File
  • K. Shimojima, R. Furutani, K. Takamasu and S. Ozono: The Estimation Method of Uncertainty of Articulated Coordinate Measuring Machine, IEEE ICIT’02, （バンコク，12月）, 2002, 411-415
  • I. Misumi, S. Gonda, T. Kurosawa, Y. Azuma, T. Fujimoto, I. Kojima, T. Sakurai, T. Ohmi, K. Takamasu: Uncertainty in Measurements of Micropatterned Thin Film Thickness Using Nanometrological AFM, Proceedings of Machines and Processes for Micro-scale and Meso-scale Fabrication, Metrology and Assembly, ASPE 2003 Winter Topical Meeting,, （フロリダ，1月），58-63

学術講演（国際会議）：2001年度
  • Gheorghe Olea, Kiyoshi Takamasu, Shigeo Ozono: Spatial Parallel Mechanism with 2DOF L-L Actuators, ISR2001（ソウル，4月）, 2001, 1129-1134
  • Kiyoshi Kotani, Kiyoshi Takamasu, Shigeo Ozono, Yoshiharu Yamamoto: A Model for Cardio-Respiratory Synchronization, 6th SIAM Conf. on Applications of Dynamical Systems（ソルトレークシティ，5月）, 2001, 137-138
  • K. Takamasu, M. Fujiwara, A. Yamaguchi, M. Hiraki and S. Ozono: Evaluation of Thermal Drift of Nano-CMM, Euspen2001（トリノ，5月）, 2001, 306-309 PDF File
  • M. Fujiwara, A. Yamaguchi, K. Takamasu and S. Ozono: Evaluation of Stages of Nano-CMM, ICPE2001（横浜，7月）, 2001, 634-638 PDF File
  • O. Sato, M. Hiraki, K. Takamasu and S. Ozono: Calibration of 2-DOF Parallel Mechanism, ICPE2001（横浜，7月）, 2001, 734-738 PDF File
  • K. TAKAMASU, M. ABBE, R. FURUTANI and S. OZONO: Estimation of Uncertainty in Feature-Based Metrology, ISMTII2001（エジプト，9月）, 2001, 47-52 PDF File
  • Ichiko MISUMI: Precision measurements of 1D-grating scale for CD-SEM calibration using nanometrological AFM, デジタルスケール国際ワークショップ（つくば，2001年11月），2001
  • Ichiko MISUMI: Precision measurements of 1D-grating scale using nanometrological AFM, MSE Workshop, Key Issues for Commercialization of MEMS - 4th Asian workshop of MEMS-PKG-, 1st Pacific Rim Meeting of Techno-Linkage of Microfabrication（つくば，2002年2月），2002

学術講演（国際会議）：2000年度
  • Chih-Chea Kuo, K. Takamasu, A. Yamamoto, K. Sunouchi, S. Wada, K. Kase, H. Tashiro: Wavelength Scanning Interferometer for Surface Profile Measurement, Proc. 6th Int. Conf. on Automation Technology, 2000, pp. 205-209
  • R.Furutani, K.Matsuoka, K.Takamasu: Parameter Calibration for Self-Referenced Pattern Projection Method, Proc. Mechatronics 2000, 2000, pp. 384-387
  • K. Takamasu, M. Fujiwara, H. Naoi, S. Ozono: Friction Drive System for Nano-CMM, Proc. Mechatronics 2000, 2000, pp. 565-568 PDF File
  • M. Abbe, K. Takamasu, S. Ozono: Reliability of Parametric Error on Calibration of CMM, IMEKO-XVI World Congress, 2000, pp. 180-184 PDF File
  • K. Enami, M. Hiraki, K. Takamasu: Nano-Probe Using Optical Sensing, IMEKO-XVI World Congress, 2000, pp. 345-348 PDF File
  • M.Hiraki, K. Takamasu, S. Ozono: Obstacle Detection Using Ring Beam System, IMEKO-XVI World Congress 2000, pp. 589-593 PDF File
  • Q. Liu, M. Hiraki and S. Ozono: The Cooperative Multi-Sensor System Based on Belief Concept, IMEKO-XVI World Congress, 2000, pp.601-605 PDF File
  • G. Olea, M. Hiraki, K. Takamasu, S. Ozono: Kinematics Analysis, Simulation and Design of a Parallel Mechanism with R-L Actuators, Proc. Parallel Kinematic Machines Int. Conf. 2000, 2000, pp. 297-305

学術講演（国際会議）：1999年度
  • Kiyoshi Takamasu, Masahiko Hiraki, Kazuhiro Enami, Shigeo Ozono: Development of Nano-CMM and Parallel-CMM - CMM in the 21th Century -, Int. Dimensional Metrology Workshop, 1999.  PDF File
  • K. Kotani, I. Hidaka, Y. Yamamoto, S. Ozono: Analysis of Respiratory Sinus Arrhythmia with Respect to Respiratory Phase, Biosignal Interpretation 99, 1999, pp. 87-90.
  • K. Takamasu, R. Furutani, S. Ozono: Statistical Evaluation of Minimum Zone Method in Coordinate Metrology, IMEKO-XV World Congress, 1999, pp. 101-106. PDF File
  • M. Hiraki, N. Yoshikawa, K. Takamasu, S. Ozono: Development of 3 DOF Parallel-CMM, IMEKO-XV World Congress, 1999, pp. 123-128.PDF File
  • K. Enami, C-C. Kuo, T. Nogami, M. Hiraki, K. Takamasu, S. Ozono: Development of nano-Probe System Using Optical Sensing, IMEKO-XV World Congress, 1999, pp. 189-192.PDF File
  • Chih-Chea Kuo, A. Suzuki, M. Hiraki, R. Furutani, K. Takamasu, S. Ozono: Development of Touch Trigger Type Pneumatic Ball Probe, IMEKO-XV World Congress, 1999, pp. 193-200.PDF File

学術講演（国際会議）：1998年度
  • K. Takamasu, Guo B-W., R. Furutani, S. Ozono: Basic Concept of Feature Based Metrology, Proc. ISMQC’98, Wien Austria, 1998, pp. 637-642. PDF File
  • Kiyoshi Takamasu, Kenji Nogami, Kazuhiro Enami, Shigeo Ozono: Development of Nano-Probe System for Nano-CMM, Proc. China-Japan Bilateral Symposium on Advanced Manufacturing Engineering, China, 1998, pp. 124-129

学術講演（国際会議）：1997年度
  • Kiyoshi Takamasu, Ryoshu Furutani, Shigeo Ozono: Development of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution), Proc. XIV IMEKO World Congress, Finland, 1997, 8 pp.34-39.
  • Ryoshu Furutani, Hidemitsu Asano, Kiyoshi Takamasu, Shigeo Ozono: 3D Profile Measurement by Self-referenced Pattern Projection, Proc. XIV IMEKO World Congress, Finland, 1997, 8 pp.190-195.
  • Luc Jammes, Yasumasa Kyodo, Masahiko Hiraki, Shigeo Ozono: Design Concept and Ondulatory Motion Mode of a Modular Snake-Like Robot, Proc. IROS 97, France, 1997, pp.1794-1799.
  • Chien-Ming Chen, Keiichi Wakida, Masahiko Hiraki, Kiyoshi Takamasu, Shigeo Ozono: A New Method for Measuring the Viscoelastic Twist Properties of Nematic Liquid Crystals by Evanescent-Wave Scattering, Proc. SPIE's 42nd Annual Meeting, San Diego, 1997, pp.146-153.
  • Kiyoshi Takamasu, Masahiko Hiraki, Ryoshu Furutani, Shigeo Ozono: Statistical Evaluation of Form Deviations in Coordinate Metrology, Proc. 9th IPES, Germany, 1997, 1 pp.90-95.
  • Masahiko Hiraki, Nobuhiro Yoshikawa, Kiyoshi Takamasu, Shigeo Ozono: Parallel-CMM (Parallel-Coordinate Measuring Machine), Proc. 9th IPES, Germany, 1997, 1 pp.363-366.
  • Kiyoshi Takamasu, Kuo Chih-Che, Akihiro Suzuki, Masahiko Hiraki, Ryoshu Furutani, Shigeo Ozono: Development of Pneumatic Ball Probe for Measuring Small Hole, Proc. ICPE'97, Taiwan, 1997, pp.767-771.PDF File
  • Sonko Osawa, Kazuhiro Enami, Ryoshu Furutani, Kiyoshi Takamasu, Shigeo Ozono: 3D-Profile Measurement by Self-referenced Pattern Projection Method - Application to the measurement of small objects -, Proc. ICPE'97, Taiwan, 1997, pp.817-821.
  • Ryoshu Furutani, Sonko Osawa, Kazuhiro Enami, Kiyoshi Takamasu, Shigeo Ozono: Quality of Projection Patterns in Self-referenced Pattern Projection Method, Proc. ICPE'97, Taiwan, 1997, pp.829-833.

学術講演（国際会議）：1996年度
  • Kiyoshi Takamasu, Satoshi Ozawa, Takayuki Asano, Akihiro Suzuki, Ryoshu Furutani, Basic Concepts of Nano-CMM (Coordinate Measuring Machine with Nanometer Resolution), Jpn.-China Bilateral Symp. on Advanced Manufacturing Eng., 1996, pp.155-158. PDF File
  • Sonko Osawa, Ryoshu Furutani, Kiyoshi Takamasu, Shigeo Ozono, Hidemitsu Asano, Profile Measurement by Combination Projection Method, Jpn.-China Bilateral Symp. on Advanced Manufacturing Eng., 1996, pp.207-211.

学術講演（国際会議）：1995年度以前（高増の関係した主な講演）
  • R. Furutani, H. Asano, K. Takamasu, S. Ozono, Profile Measurement by Comparing Multi-Gray Scale Projection with Reference Projection, Proc. 5th ISMQC, 1995, pp.368-372.
  • Kiyoshi Takamasu, Ichiro Fukuda, Ryoshu Furutani, Shigeo Ozono, Data Processing Method for Geometrical Forms with Form Deviations in Coordinate Metrology, Proc. 4th CIRP Seminar on Comp. Aided Tolerancing, 1995, pp.301-311.
  • Cheng Yuhui, Takanori Ikegami, Kiyoshi Takamasu, Shigeo Ozono, Sensing Strategy and Recognizing Attractor, Proc. IEEE Int. Conf. Multisensor Fusion and Integration for Intell. Systems, 1994, pp.169-174.
  • Kiyoshi Takamasu, Kazuhiko Kawakami, Shigeo Ozono, Development of Optical Fiber Probes for NFSOM (Near-Field Scanning Optical Microscope), 4th Nanotechnology Symposium, 1994, pp.55-59.
  • Koichiro Okamura, Kiyoshi Takamasu, Shigeo Ozono, Ryoshu Furutani, Calibration of a Manipulator via the Product-of-Exponentials, 2nd Japan-France Cong. on Mechatronics, 1994, pp.400-403.
  • Kiyoshi Takamasu, Atushi Kobaru, Three Dimensional Position Measurement Using Optical Collimation, 3rd Int. Nanotechnology Symp., 1992, pp.23-26.
  • Kiyoshi Takamasu, Measuring System for Multi-Freedom Robot, Proc. 1st Japanese-French Congr. Mechatronics, 1992, pp.125-130.
  • Kiyoshi Takamasu, Atushi Kobaru, Ryoshu Furutani, Shigeo Ozono, Three Dimensional Position Measurement Using Critical Angle Prism, Proc. ISMQC, 1992, pp.193-201.
  • Kiyoshi Takamasu, Measurement System for Multiple Degree of Freedom Moving Robot, J. Robotics Mechatronics, 5(5), 1993, pp.453-456.
  • Kiyoshi Takamasu, Atushi Kobaru, Ryoshu Furutani, Shigeo Ozono, Three Dimensional Position Sensor Using Optical Collimator for Nanometer Resolution, 7th Int. Prec. Eng. Seminar, 1993, pp.62-65.
  • Kiyoshi Takamasu, Tetuo Uekawa, Kazuhiko Kawakami, Shigeo Ozono, Ryoshu Furutani, Profile Measurements Using Multi-Gray Scale Pattern Projection, 2nd Int. Symp. on Measurement Tech Intell. Instruments. 1993, pp.93-109.
  • Kiyoshi Takamasu, T. Kasahara, Three Dimensional Position Measurement of Spherical Target Using Optical Collimator, Proc. ISMQC, Aachen, 1989, pp.87-92.
  • Kiyoshi TAKAMASU, Yasuhiko ENDOH, Profile Measurement of Reflector by Image Processing Using LED Display Unit, Proc. ISPMIE, Shanghai, 1987, pp.507-510.
  • Junichi Kato, T. Tanaka, Shigeo Ozono, Masahiko Shizawa, Kiyoshi Takamasu, A Real-Time Profile Restoration Method From Fringe Patterns Using Digital Signal Processing, Proc. ISPMIE, Shanghai, 1987, pp.489-492.
  • S.OZONO, J.KATO, M.HIRATA, K.TAKAMASU, Sensor for Guiding Mobile Robot, Proc. ISPMIE, Shanghai, 1987, pp.493-495.
  • Shigeo OZONO, Kiyoshi TAKAMASU, Junichi KATO, Masayuki HIRATA, Application of High-Speed Distance Sensor to Guidance for Mobile Robot, Proc. IMEKO TC14, 1986, pp.51-58.
  • Kiyoshi TAKAMASU, Ryoshu FURUTANI, Shigeo OZONO，Development of the Three Dimensional Coordinate Measuring System with Ultra-Sonic Sensors, Proc. of 1st ISMQC, 1984, pp.300-305.